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Matches in SemOpenAlex for { <https://semopenalex.org/work/W62486330> ?p ?o ?g. }

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• W62486330 date "1993-01-01" @default.
• W62486330 modified "2023-09-27" @default.
• W62486330 title "Strain Dependent Diffusion During Dry Thermal Oxidation of Crystalline Si" @default.
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• W62486330 doi "https://doi.org/10.1007/978-1-4899-1588-7_3" @default.
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