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- W626624871 created "2016-06-24" @default.
- W626624871 creator A5009049525 @default.
- W626624871 date "1999-01-01" @default.
- W626624871 modified "2023-09-25" @default.
- W626624871 title "Studies on low temperature polycrystalline silicon film formation using electron cyclotron resonance silane/hydrogen plasma" @default.
- W626624871 doi "https://doi.org/10.11501/3152112" @default.
- W626624871 hasPublicationYear "1999" @default.
- W626624871 type Work @default.
- W626624871 sameAs 626624871 @default.
- W626624871 citedByCount "0" @default.
- W626624871 crossrefType "dissertation" @default.
- W626624871 hasAuthorship W626624871A5009049525 @default.
- W626624871 hasConcept C113196181 @default.
- W626624871 hasConcept C121332964 @default.
- W626624871 hasConcept C132427895 @default.
- W626624871 hasConcept C137637335 @default.
- W626624871 hasConcept C147120987 @default.
- W626624871 hasConcept C159985019 @default.
- W626624871 hasConcept C175361016 @default.
- W626624871 hasConcept C178790620 @default.
- W626624871 hasConcept C184779094 @default.
- W626624871 hasConcept C185544564 @default.
- W626624871 hasConcept C185592680 @default.
- W626624871 hasConcept C191897082 @default.
- W626624871 hasConcept C192562407 @default.
- W626624871 hasConcept C22175881 @default.
- W626624871 hasConcept C2778024649 @default.
- W626624871 hasConcept C2779227376 @default.
- W626624871 hasConcept C2780565262 @default.
- W626624871 hasConcept C39527238 @default.
- W626624871 hasConcept C43617362 @default.
- W626624871 hasConcept C49040817 @default.
- W626624871 hasConcept C512968161 @default.
- W626624871 hasConcept C544956773 @default.
- W626624871 hasConcept C82706917 @default.
- W626624871 hasConcept C87359718 @default.
- W626624871 hasConceptScore W626624871C113196181 @default.
- W626624871 hasConceptScore W626624871C121332964 @default.
- W626624871 hasConceptScore W626624871C132427895 @default.
- W626624871 hasConceptScore W626624871C137637335 @default.
- W626624871 hasConceptScore W626624871C147120987 @default.
- W626624871 hasConceptScore W626624871C159985019 @default.
- W626624871 hasConceptScore W626624871C175361016 @default.
- W626624871 hasConceptScore W626624871C178790620 @default.
- W626624871 hasConceptScore W626624871C184779094 @default.
- W626624871 hasConceptScore W626624871C185544564 @default.
- W626624871 hasConceptScore W626624871C185592680 @default.
- W626624871 hasConceptScore W626624871C191897082 @default.
- W626624871 hasConceptScore W626624871C192562407 @default.
- W626624871 hasConceptScore W626624871C22175881 @default.
- W626624871 hasConceptScore W626624871C2778024649 @default.
- W626624871 hasConceptScore W626624871C2779227376 @default.
- W626624871 hasConceptScore W626624871C2780565262 @default.
- W626624871 hasConceptScore W626624871C39527238 @default.
- W626624871 hasConceptScore W626624871C43617362 @default.
- W626624871 hasConceptScore W626624871C49040817 @default.
- W626624871 hasConceptScore W626624871C512968161 @default.
- W626624871 hasConceptScore W626624871C544956773 @default.
- W626624871 hasConceptScore W626624871C82706917 @default.
- W626624871 hasConceptScore W626624871C87359718 @default.
- W626624871 hasLocation W6266248711 @default.
- W626624871 hasOpenAccess W626624871 @default.
- W626624871 hasPrimaryLocation W6266248711 @default.
- W626624871 hasRelatedWork W1660746411 @default.
- W626624871 hasRelatedWork W1978799812 @default.
- W626624871 hasRelatedWork W1979503401 @default.
- W626624871 hasRelatedWork W1981652398 @default.
- W626624871 hasRelatedWork W1982860286 @default.
- W626624871 hasRelatedWork W1991624745 @default.
- W626624871 hasRelatedWork W1999625112 @default.
- W626624871 hasRelatedWork W2014294243 @default.
- W626624871 hasRelatedWork W2044240239 @default.
- W626624871 hasRelatedWork W2052322825 @default.
- W626624871 hasRelatedWork W2090550466 @default.
- W626624871 hasRelatedWork W2095629002 @default.
- W626624871 hasRelatedWork W2144097057 @default.
- W626624871 hasRelatedWork W2162172155 @default.
- W626624871 hasRelatedWork W2168147320 @default.
- W626624871 hasRelatedWork W2299760578 @default.
- W626624871 hasRelatedWork W2307261547 @default.
- W626624871 hasRelatedWork W2375699587 @default.
- W626624871 hasRelatedWork W2998959485 @default.
- W626624871 hasRelatedWork W3027618227 @default.
- W626624871 isParatext "false" @default.
- W626624871 isRetracted "false" @default.
- W626624871 magId "626624871" @default.
- W626624871 workType "dissertation" @default.