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- W628053655 endingPage "641" @default.
- W628053655 startingPage "637" @default.
- W628053655 created "2016-06-24" @default.
- W628053655 date "2004-09-01" @default.
- W628053655 modified "2023-10-14" @default.
- W628053655 title "Stability of Sputtered Hf-Silicate Films in Poly Si/Hf-Silicate Gate Stack Under the Chemical Vapor Deposition of Poly Si and by Annealing" @default.
- W628053655 cites W1970200102 @default.
- W628053655 cites W1981455606 @default.
- W628053655 cites W1991965248 @default.
- W628053655 cites W2003645630 @default.
- W628053655 cites W2019592005 @default.
- W628053655 cites W2026989175 @default.
- W628053655 cites W2059819937 @default.
- W628053655 cites W2072838900 @default.
- W628053655 cites W2081920240 @default.
- W628053655 cites W2107920955 @default.
- W628053655 cites W2131965942 @default.
- W628053655 doi "https://doi.org/10.4191/kcers.2004.41.9.637" @default.
- W628053655 hasPublicationYear "2004" @default.
- W628053655 type Work @default.
- W628053655 sameAs 628053655 @default.
- W628053655 citedByCount "0" @default.
- W628053655 crossrefType "journal-article" @default.
- W628053655 hasConcept C127413603 @default.
- W628053655 hasConcept C159985019 @default.
- W628053655 hasConcept C171250308 @default.
- W628053655 hasConcept C191897082 @default.
- W628053655 hasConcept C192562407 @default.
- W628053655 hasConcept C2777335606 @default.
- W628053655 hasConcept C2777855556 @default.
- W628053655 hasConcept C2993621735 @default.
- W628053655 hasConcept C42360764 @default.
- W628053655 hasConcept C57410435 @default.
- W628053655 hasConceptScore W628053655C127413603 @default.
- W628053655 hasConceptScore W628053655C159985019 @default.
- W628053655 hasConceptScore W628053655C171250308 @default.
- W628053655 hasConceptScore W628053655C191897082 @default.
- W628053655 hasConceptScore W628053655C192562407 @default.
- W628053655 hasConceptScore W628053655C2777335606 @default.
- W628053655 hasConceptScore W628053655C2777855556 @default.
- W628053655 hasConceptScore W628053655C2993621735 @default.
- W628053655 hasConceptScore W628053655C42360764 @default.
- W628053655 hasConceptScore W628053655C57410435 @default.
- W628053655 hasIssue "9" @default.
- W628053655 hasLocation W6280536551 @default.
- W628053655 hasOpenAccess W628053655 @default.
- W628053655 hasPrimaryLocation W6280536551 @default.
- W628053655 hasRelatedWork W1952470480 @default.
- W628053655 hasRelatedWork W1971910002 @default.
- W628053655 hasRelatedWork W1986510446 @default.
- W628053655 hasRelatedWork W2000306118 @default.
- W628053655 hasRelatedWork W2078672018 @default.
- W628053655 hasRelatedWork W2093817930 @default.
- W628053655 hasRelatedWork W2615003963 @default.
- W628053655 hasRelatedWork W3160856730 @default.
- W628053655 hasRelatedWork W2534339278 @default.
- W628053655 hasRelatedWork W4297935818 @default.
- W628053655 hasVolume "41" @default.
- W628053655 isParatext "false" @default.
- W628053655 isRetracted "false" @default.
- W628053655 magId "628053655" @default.
- W628053655 workType "article" @default.