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- W632224640 created "2016-06-24" @default.
- W632224640 creator A5017878450 @default.
- W632224640 date "1996-01-01" @default.
- W632224640 modified "2023-09-23" @default.
- W632224640 title "Studies on radicals in CHF[3] ECR etching plasma using spectroscopic techniques" @default.
- W632224640 doi "https://doi.org/10.11501/3111188" @default.
- W632224640 hasPublicationYear "1996" @default.
- W632224640 type Work @default.
- W632224640 sameAs 632224640 @default.
- W632224640 citedByCount "0" @default.
- W632224640 crossrefType "dissertation" @default.
- W632224640 hasAuthorship W632224640A5017878450 @default.
- W632224640 hasConcept C100460472 @default.
- W632224640 hasConcept C107187091 @default.
- W632224640 hasConcept C107872376 @default.
- W632224640 hasConcept C113196181 @default.
- W632224640 hasConcept C121332964 @default.
- W632224640 hasConcept C139066938 @default.
- W632224640 hasConcept C171250308 @default.
- W632224640 hasConcept C178790620 @default.
- W632224640 hasConcept C185544564 @default.
- W632224640 hasConcept C185592680 @default.
- W632224640 hasConcept C192562407 @default.
- W632224640 hasConcept C2779227376 @default.
- W632224640 hasConcept C82706917 @default.
- W632224640 hasConceptScore W632224640C100460472 @default.
- W632224640 hasConceptScore W632224640C107187091 @default.
- W632224640 hasConceptScore W632224640C107872376 @default.
- W632224640 hasConceptScore W632224640C113196181 @default.
- W632224640 hasConceptScore W632224640C121332964 @default.
- W632224640 hasConceptScore W632224640C139066938 @default.
- W632224640 hasConceptScore W632224640C171250308 @default.
- W632224640 hasConceptScore W632224640C178790620 @default.
- W632224640 hasConceptScore W632224640C185544564 @default.
- W632224640 hasConceptScore W632224640C185592680 @default.
- W632224640 hasConceptScore W632224640C192562407 @default.
- W632224640 hasConceptScore W632224640C2779227376 @default.
- W632224640 hasConceptScore W632224640C82706917 @default.
- W632224640 hasLocation W6322246401 @default.
- W632224640 hasOpenAccess W632224640 @default.
- W632224640 hasPrimaryLocation W6322246401 @default.
- W632224640 hasRelatedWork W1597604009 @default.
- W632224640 hasRelatedWork W1967941516 @default.
- W632224640 hasRelatedWork W1986914212 @default.
- W632224640 hasRelatedWork W1987763781 @default.
- W632224640 hasRelatedWork W2058360796 @default.
- W632224640 hasRelatedWork W2066738165 @default.
- W632224640 hasRelatedWork W2081963956 @default.
- W632224640 hasRelatedWork W2091237834 @default.
- W632224640 hasRelatedWork W2315857727 @default.
- W632224640 hasRelatedWork W2329765547 @default.
- W632224640 hasRelatedWork W2388671927 @default.
- W632224640 hasRelatedWork W2562395217 @default.
- W632224640 hasRelatedWork W2605072132 @default.
- W632224640 hasRelatedWork W2612463763 @default.
- W632224640 hasRelatedWork W3024063079 @default.
- W632224640 hasRelatedWork W305254715 @default.
- W632224640 hasRelatedWork W591600336 @default.
- W632224640 hasRelatedWork W602296461 @default.
- W632224640 hasRelatedWork W3122314978 @default.
- W632224640 hasRelatedWork W318377730 @default.
- W632224640 isParatext "false" @default.
- W632224640 isRetracted "false" @default.
- W632224640 magId "632224640" @default.
- W632224640 workType "dissertation" @default.