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- W638532913 created "2016-06-24" @default.
- W638532913 creator A5078144910 @default.
- W638532913 date "2004-01-01" @default.
- W638532913 modified "2023-09-23" @default.
- W638532913 title "2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : Advancing the science and technology of semiconductor manufacturing excellence : ASMC 2004 proceedings, May 4-6, 2004, Boston, Massachusetts, USA" @default.
- W638532913 hasPublicationYear "2004" @default.
- W638532913 type Work @default.
- W638532913 sameAs 638532913 @default.
- W638532913 citedByCount "0" @default.
- W638532913 crossrefType "book" @default.
- W638532913 hasAuthorship W638532913A5078144910 @default.
- W638532913 hasConcept C108225325 @default.
- W638532913 hasConcept C110354214 @default.
- W638532913 hasConcept C117671659 @default.
- W638532913 hasConcept C119599485 @default.
- W638532913 hasConcept C127413603 @default.
- W638532913 hasConcept C160671074 @default.
- W638532913 hasConcept C161191863 @default.
- W638532913 hasConcept C17744445 @default.
- W638532913 hasConcept C199539241 @default.
- W638532913 hasConcept C2777352838 @default.
- W638532913 hasConcept C41008148 @default.
- W638532913 hasConcept C61696701 @default.
- W638532913 hasConcept C66018809 @default.
- W638532913 hasConceptScore W638532913C108225325 @default.
- W638532913 hasConceptScore W638532913C110354214 @default.
- W638532913 hasConceptScore W638532913C117671659 @default.
- W638532913 hasConceptScore W638532913C119599485 @default.
- W638532913 hasConceptScore W638532913C127413603 @default.
- W638532913 hasConceptScore W638532913C160671074 @default.
- W638532913 hasConceptScore W638532913C161191863 @default.
- W638532913 hasConceptScore W638532913C17744445 @default.
- W638532913 hasConceptScore W638532913C199539241 @default.
- W638532913 hasConceptScore W638532913C2777352838 @default.
- W638532913 hasConceptScore W638532913C41008148 @default.
- W638532913 hasConceptScore W638532913C61696701 @default.
- W638532913 hasConceptScore W638532913C66018809 @default.
- W638532913 hasLocation W6385329131 @default.
- W638532913 hasOpenAccess W638532913 @default.
- W638532913 hasPrimaryLocation W6385329131 @default.
- W638532913 hasRelatedWork W1502540692 @default.
- W638532913 hasRelatedWork W2135407724 @default.
- W638532913 hasRelatedWork W2533890864 @default.
- W638532913 hasRelatedWork W2915470899 @default.
- W638532913 hasRelatedWork W2916051363 @default.
- W638532913 hasRelatedWork W2916906315 @default.
- W638532913 hasRelatedWork W2917802463 @default.
- W638532913 hasRelatedWork W410191966 @default.
- W638532913 hasRelatedWork W574797233 @default.
- W638532913 hasRelatedWork W577625329 @default.
- W638532913 hasRelatedWork W586644397 @default.
- W638532913 hasRelatedWork W586687062 @default.
- W638532913 hasRelatedWork W588594367 @default.
- W638532913 hasRelatedWork W590933137 @default.
- W638532913 hasRelatedWork W592356856 @default.
- W638532913 hasRelatedWork W615159628 @default.
- W638532913 hasRelatedWork W624985412 @default.
- W638532913 hasRelatedWork W642118897 @default.
- W638532913 hasRelatedWork W654060033 @default.
- W638532913 hasRelatedWork W209971628 @default.
- W638532913 isParatext "false" @default.
- W638532913 isRetracted "false" @default.
- W638532913 magId "638532913" @default.
- W638532913 workType "book" @default.