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Matches in SemOpenAlex for { <https://semopenalex.org/work/W64304895> ?p ?o ?g. }

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• W64304895 date "1990-01-01" @default.
• W64304895 modified "2023-09-23" @default.
• W64304895 title "Plasma-Enhanced CVD of Silicon-Related Compounds" @default.
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• W64304895 doi "https://doi.org/10.1007/978-94-009-1946-4_29" @default.
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