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- W653451331 date "1988-06-05" @default.
- W653451331 modified "2023-09-24" @default.
- W653451331 title "3 PVD・CVD 技術による薄膜のハイブリッド化(I. 材料のハイブリッド化のための加工技術)( 材料のハイブリッド化と加工技術の進歩)" @default.
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