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Matches in SemOpenAlex for { <https://semopenalex.org/work/W98394545> ?p ?o ?g. }

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• W98394545 date "1990-01-01" @default.
• W98394545 modified "2023-09-26" @default.
• W98394545 title "Lithography for High Energy Technology in Microelectronics" @default.
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• W98394545 doi "https://doi.org/10.1007/978-94-009-0499-6_1" @default.
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