Matches in Wikidata for { <http://www.wikidata.org/entity/Q38824038> ?p ?o ?g. }
- Q38824038 P356 ACSAMI.6B07181 @default.
- Q38824038 P698 27598509 @default.
- Q38824038 P1433 Q2819060 @default.
- Q38824038 P1476 "Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper" @default.
- Q38824038 P2093 "Basoene Briggs" @default.
- Q38824038 P2093 "Christophe Detavernie" @default.
- Q38824038 P2093 "Christopher J Wilson" @default.
- Q38824038 P2093 "Dirch H Petersen" @default.
- Q38824038 P2093 "Frederik W Østerberg" @default.
- Q38824038 P2093 "Ivan Ciofi" @default.
- Q38824038 P2093 "Jürgen Bömmels" @default.
- Q38824038 P2093 "Karl Opsomer" @default.
- Q38824038 P2093 "Kris Vanstreels" @default.
- Q38824038 P2093 "Kristof Croes" @default.
- Q38824038 P2093 "Liang Gong Wen" @default.
- Q38824038 P2093 "Mihaela I Popovici" @default.
- Q38824038 P2093 "Nancy Heylen" @default.
- Q38824038 P2093 "Olalla Varela Pedreira" @default.
- Q38824038 P2093 "Philippe Roussel" @default.
- Q38824038 P2093 "Shibesh Dutta" @default.
- Q38824038 P2093 "Sven Van Elshocht" @default.
- Q38824038 P2093 "Zsolt Tőkei" @default.
- Q38824038 P304 "26119-26125" @default.
- Q38824038 P31 Q13442814 @default.
- Q38824038 P356 "10.1021/ACSAMI.6B07181" @default.
- Q38824038 P407 Q1860 @default.
- Q38824038 P433 "39" @default.
- Q38824038 P478 "8" @default.
- Q38824038 P50 Q50539259 @default.
- Q38824038 P50 Q56424345 @default.
- Q38824038 P50 Q61805073 @default.
- Q38824038 P577 "2016-09-06T00:00:00Z" @default.
- Q38824038 P698 "27598509" @default.