Matches in Wikidata for { <http://www.wikidata.org/entity/Q38824038> ?p ?o ?g. }
- Q38824038 description "2016 nî lūn-bûn" @default.
- Q38824038 description "2016 թվականի սեպտեմբերի 6-ին հրատարակված գիտական հոդված" @default.
- Q38824038 description "2016年の論文" @default.
- Q38824038 description "2016年論文" @default.
- Q38824038 description "2016年論文" @default.
- Q38824038 description "2016年論文" @default.
- Q38824038 description "2016年論文" @default.
- Q38824038 description "2016年論文" @default.
- Q38824038 description "2016年论文" @default.
- Q38824038 description "2016年论文" @default.
- Q38824038 description "2016年论文" @default.
- Q38824038 description "2016年论文" @default.
- Q38824038 description "2016年论文" @default.
- Q38824038 description "2016年论文" @default.
- Q38824038 description "2016년 논문" @default.
- Q38824038 description "article científic" @default.
- Q38824038 description "article scientific" @default.
- Q38824038 description "article scientifique" @default.
- Q38824038 description "articol științific" @default.
- Q38824038 description "articolo scientifico" @default.
- Q38824038 description "artigo científico" @default.
- Q38824038 description "artigo científico" @default.
- Q38824038 description "artigo científico" @default.
- Q38824038 description "artikel ilmiah" @default.
- Q38824038 description "artikull shkencor" @default.
- Q38824038 description "artikulong pang-agham" @default.
- Q38824038 description "artykuł naukowy" @default.
- Q38824038 description "artículo científico publicado en 2016" @default.
- Q38824038 description "artículu científicu espublizáu en 2016" @default.
- Q38824038 description "bilimsel makale" @default.
- Q38824038 description "bài báo khoa học" @default.
- Q38824038 description "naučni članak" @default.
- Q38824038 description "scienca artikolo" @default.
- Q38824038 description "scientific article published on 6 September 2016" @default.
- Q38824038 description "scientific article published on 6 September 2016" @default.
- Q38824038 description "scientific article published on 6 September 2016" @default.
- Q38824038 description "teaduslik artikkel" @default.
- Q38824038 description "tieteellinen artikkeli" @default.
- Q38824038 description "tudományos cikk" @default.
- Q38824038 description "vedecký článok" @default.
- Q38824038 description "vetenskaplig artikel" @default.
- Q38824038 description "videnskabelig artikel" @default.
- Q38824038 description "vitenskapelig artikkel" @default.
- Q38824038 description "vitskapeleg artikkel" @default.
- Q38824038 description "vědecký článek" @default.
- Q38824038 description "wetenschappelijk artikel" @default.
- Q38824038 description "wissenschaftlicher Artikel" @default.
- Q38824038 description "επιστημονικό άρθρο" @default.
- Q38824038 description "мақолаи илмӣ" @default.
- Q38824038 description "наукова стаття, опублікована у вересні 2016" @default.
- Q38824038 description "научна статия" @default.
- Q38824038 description "научная статья" @default.
- Q38824038 description "научни чланак" @default.
- Q38824038 description "научни чланак" @default.
- Q38824038 description "מאמר מדעי" @default.
- Q38824038 description "مقالة علمية نشرت في 6 سبتمبر 2016" @default.
- Q38824038 description "৬ সেপ্টেম্বর ২০১৬-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q38824038 description "บทความทางวิทยาศาสตร์" @default.
- Q38824038 description "სამეცნიერო სტატია" @default.
- Q38824038 name "Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper" @default.
- Q38824038 name "Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper" @default.
- Q38824038 name "Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper" @default.
- Q38824038 type Item @default.
- Q38824038 label "Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper" @default.
- Q38824038 label "Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper" @default.
- Q38824038 label "Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper" @default.
- Q38824038 prefLabel "Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper" @default.
- Q38824038 prefLabel "Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper" @default.
- Q38824038 prefLabel "Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper" @default.
- Q38824038 P1433 Q38824038-7480D04D-9398-4C54-BC12-896F060D6928 @default.
- Q38824038 P1476 Q38824038-55819A25-A4CA-4259-95C4-79B09289E64D @default.
- Q38824038 P2093 Q38824038-00D1FC60-608C-46ED-92D7-2060B5582D19 @default.
- Q38824038 P2093 Q38824038-03FDCEFF-C85B-4AF6-A791-CF09573CDB1F @default.
- Q38824038 P2093 Q38824038-10BCCAE0-8A50-4C8A-A0E7-2671D9FCDD5D @default.
- Q38824038 P2093 Q38824038-21AFA2DC-01D8-481E-9F3F-D5298608E2A6 @default.
- Q38824038 P2093 Q38824038-21B42399-805E-4A09-A820-B63E695F03ED @default.
- Q38824038 P2093 Q38824038-271AC7BA-53AC-42EF-B6F7-8E1C7DC4A46A @default.
- Q38824038 P2093 Q38824038-45D8CFEB-762D-4CD9-B897-8D308CCB06F5 @default.
- Q38824038 P2093 Q38824038-51D8AA2E-8311-45B7-9028-81DE0AC1AAE0 @default.
- Q38824038 P2093 Q38824038-6C5375D9-C4C4-452B-BF3E-A268A6469908 @default.
- Q38824038 P2093 Q38824038-799BBF32-8D75-431D-8B23-BAB36BACFD64 @default.
- Q38824038 P2093 Q38824038-89684DC6-70D6-4E4B-AD75-03B2204C2604 @default.
- Q38824038 P2093 Q38824038-9F360DDD-FD9C-4BD2-AB21-DFBE4CA51263 @default.
- Q38824038 P2093 Q38824038-B3E6A3C9-EA07-44E6-B17A-EC750FE2E3DB @default.
- Q38824038 P2093 Q38824038-C15ABB66-EF22-4D7C-9099-B9A0D79B1D8C @default.
- Q38824038 P2093 Q38824038-D0DBBC79-ADF0-4658-B60E-2D4E1ECA4395 @default.
- Q38824038 P2093 Q38824038-E954AB33-74A8-417D-A2C5-13F423F13F2B @default.
- Q38824038 P2093 Q38824038-F9CBC281-EDA3-4218-A8D6-629D6754082F @default.
- Q38824038 P2093 Q38824038-FCD11A9B-0969-4486-8424-7AA157839144 @default.
- Q38824038 P304 Q38824038-3938834A-EC2C-4190-87C4-B2F6309FC885 @default.
- Q38824038 P31 Q38824038-9DC37A6C-36FB-4D46-B12D-1FA9002A009B @default.
- Q38824038 P356 Q38824038-74EEF77F-7671-4EC4-8B2A-6ECEBDAF96CB @default.
- Q38824038 P407 Q38824038-4AC7D218-6242-468E-8140-3FCBBD92E0BD @default.
- Q38824038 P433 Q38824038-D6480780-278A-4021-85F4-E0B36B5F34C5 @default.
- Q38824038 P478 Q38824038-F6B18FBA-DD5B-4BEC-A302-E615CA9BB83C @default.
- Q38824038 P50 Q38824038-5BFFD7CE-DFCE-40A8-9C14-CA308985D487 @default.
- Q38824038 P50 Q38824038-AB061707-7AED-478F-8A53-0D1912701DD4 @default.
- Q38824038 P50 Q38824038-EE3663DD-8C2C-42B0-9984-DAF6AB74B7A6 @default.
- Q38824038 P577 Q38824038-A39809A7-B761-4802-9D95-D43CDEA67A0A @default.
- Q38824038 P698 Q38824038-0810F0FE-D655-474E-B645-73C7D3F08923 @default.