Matches in Wikidata for { <http://www.wikidata.org/entity/Q28822442> ?p ?o ?g. }
- Q28822442 description "2013 nî lūn-bûn" @default.
- Q28822442 description "2013 թուականի Հոկտեմբերին հրատարակուած գիտական յօդուած" @default.
- Q28822442 description "2013 թվականի հոտեմբերին հրատարակված գիտական հոդված" @default.
- Q28822442 description "2013年の論文" @default.
- Q28822442 description "2013年論文" @default.
- Q28822442 description "2013年論文" @default.
- Q28822442 description "2013年論文" @default.
- Q28822442 description "2013年論文" @default.
- Q28822442 description "2013年論文" @default.
- Q28822442 description "2013年论文" @default.
- Q28822442 description "2013年论文" @default.
- Q28822442 description "2013年论文" @default.
- Q28822442 description "2013年论文" @default.
- Q28822442 description "2013年论文" @default.
- Q28822442 description "2013年论文" @default.
- Q28822442 description "2013년 논문" @default.
- Q28822442 description "article científic" @default.
- Q28822442 description "article scientific" @default.
- Q28822442 description "article scientifique" @default.
- Q28822442 description "articol științific" @default.
- Q28822442 description "articolo scientifico" @default.
- Q28822442 description "artigo científico" @default.
- Q28822442 description "artigo científico" @default.
- Q28822442 description "artigo científico" @default.
- Q28822442 description "artikull shkencor" @default.
- Q28822442 description "artikulong pang-agham" @default.
- Q28822442 description "artykuł naukowy" @default.
- Q28822442 description "artículo científico publicado en 2013" @default.
- Q28822442 description "artículu científicu espublizáu en 2013" @default.
- Q28822442 description "bilimsel makale" @default.
- Q28822442 description "bài báo khoa học" @default.
- Q28822442 description "mokslinis straipsnis" @default.
- Q28822442 description "naučni članak" @default.
- Q28822442 description "scienca artikolo" @default.
- Q28822442 description "scientific article (publication date: October 2013)" @default.
- Q28822442 description "teaduslik artikkel" @default.
- Q28822442 description "tieteellinen artikkeli" @default.
- Q28822442 description "tudományos cikk" @default.
- Q28822442 description "vedecký článok" @default.
- Q28822442 description "vetenskaplig artikel" @default.
- Q28822442 description "videnskabelig artikel" @default.
- Q28822442 description "vitenskapelig artikkel" @default.
- Q28822442 description "vitskapeleg artikkel" @default.
- Q28822442 description "vědecký článek" @default.
- Q28822442 description "wetenschappelijk artikel (gepubliceerd in 2013-10)" @default.
- Q28822442 description "wissenschaftlicher Artikel" @default.
- Q28822442 description "επιστημονικό άρθρο" @default.
- Q28822442 description "мақолаи илмӣ" @default.
- Q28822442 description "мақолаи илмӣ" @default.
- Q28822442 description "наукова стаття, опублікована в жовтні 2013" @default.
- Q28822442 description "научна статия" @default.
- Q28822442 description "научная статья" @default.
- Q28822442 description "научни чланак" @default.
- Q28822442 description "научни чланак" @default.
- Q28822442 description "מאמר מדעי" @default.
- Q28822442 description "مقالة علمية (نشرت في أكتوبر 2013)" @default.
- Q28822442 description "২০১৩-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q28822442 description "บทความทางวิทยาศาสตร์" @default.
- Q28822442 description "სამეცნიერო სტატია" @default.
- Q28822442 name "Material design of plasma-enhanced chemical vapour deposition SiCH films for low-k cap layers in the further scaling of ultra-large-scale integrated devices-Cu interconnects" @default.
- Q28822442 name "Material design of plasma-enhanced chemical vapour deposition SiCH films for low-k cap layers in the further scaling of ultra-large-scale integrated devices-Cu interconnects" @default.
- Q28822442 type Item @default.
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- Q28822442 prefLabel "Material design of plasma-enhanced chemical vapour deposition SiCH films for low-k cap layers in the further scaling of ultra-large-scale integrated devices-Cu interconnects" @default.
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- Q28822442 P1476 "Material design of plasma-enhanced chemical vapour deposition SiCH films for low-k cap layers in the further scaling of ultra-large-scale integrated devices-Cu interconnects" @default.
- Q28822442 P2093 "Akira Uedono" @default.
- Q28822442 P2093 "Hideharu Shimizu" @default.
- Q28822442 P2093 "Nobuo Tajima" @default.
- Q28822442 P2093 "Shuji Nagano" @default.
- Q28822442 P2093 "Takeshi Momose" @default.
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