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- Q34330293 description "2012 nî lūn-bûn" @default.
- Q34330293 description "2012 թուականի Յուլիսին հրատարակուած գիտական յօդուած" @default.
- Q34330293 description "2012 թվականի հուլիսին հրատարակված գիտական հոդված" @default.
- Q34330293 description "2012年の論文" @default.
- Q34330293 description "2012年学术文章" @default.
- Q34330293 description "2012年学术文章" @default.
- Q34330293 description "2012年学术文章" @default.
- Q34330293 description "2012年学术文章" @default.
- Q34330293 description "2012年学术文章" @default.
- Q34330293 description "2012年學術文章" @default.
- Q34330293 description "2012年學術文章" @default.
- Q34330293 description "2012年學術文章" @default.
- Q34330293 description "2012年學術文章" @default.
- Q34330293 description "2012年學術文章" @default.
- Q34330293 description "2012年學術文章" @default.
- Q34330293 description "2012년 논문" @default.
- Q34330293 description "article científic" @default.
- Q34330293 description "article scientific" @default.
- Q34330293 description "article scientifique (publié 2012)" @default.
- Q34330293 description "articol științific" @default.
- Q34330293 description "articolo scientifico" @default.
- Q34330293 description "artigo científico (publicado na 2012)" @default.
- Q34330293 description "artigo científico (publicado na 2012)" @default.
- Q34330293 description "artigo científico" @default.
- Q34330293 description "artikull shkencor" @default.
- Q34330293 description "artikulong pang-agham" @default.
- Q34330293 description "artykuł naukowy" @default.
- Q34330293 description "artículo científico publicado en 2012" @default.
- Q34330293 description "artículu científicu espublizáu en 2012" @default.
- Q34330293 description "bilimsel makale" @default.
- Q34330293 description "bài báo khoa học" @default.
- Q34330293 description "mokslinis straipsnis" @default.
- Q34330293 description "naučni članak" @default.
- Q34330293 description "scienca artikolo" @default.
- Q34330293 description "scientific article" @default.
- Q34330293 description "teaduslik artikkel" @default.
- Q34330293 description "tieteellinen artikkeli" @default.
- Q34330293 description "tudományos cikk" @default.
- Q34330293 description "vedecký článok" @default.
- Q34330293 description "vetenskaplig artikel" @default.
- Q34330293 description "videnskabelig artikel (udgivet 2012)" @default.
- Q34330293 description "vitenskapelig artikkel" @default.
- Q34330293 description "vitskapeleg artikkel" @default.
- Q34330293 description "vědecký článek" @default.
- Q34330293 description "wetenschappelijk artikel" @default.
- Q34330293 description "wissenschaftlicher Artikel" @default.
- Q34330293 description "επιστημονικό άρθρο" @default.
- Q34330293 description "мақолаи илмӣ" @default.
- Q34330293 description "мақолаи илмӣ" @default.
- Q34330293 description "наукова стаття, опублікована в липні 2012" @default.
- Q34330293 description "научна статия" @default.
- Q34330293 description "научная статья" @default.
- Q34330293 description "научни чланак" @default.
- Q34330293 description "научни чланак" @default.
- Q34330293 description "מאמר מדעי" @default.
- Q34330293 description "سائنسی مضمون" @default.
- Q34330293 description "مقالة علمية نشرت بتاريخ 1-7-2012" @default.
- Q34330293 description "مقالهٔ علمی" @default.
- Q34330293 description "২০১২-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q34330293 description "บทความทางวิทยาศาสตร์" @default.
- Q34330293 description "სამეცნიერო სტატია" @default.
- Q34330293 name "Actinic microscope for extreme ultraviolet lithography photomask inspection and review" @default.
- Q34330293 name "Actinic microscope for extreme ultraviolet lithography photomask inspection and review" @default.
- Q34330293 name "Actinic microscope for extreme ultraviolet lithography photomask inspection and review" @default.
- Q34330293 type Item @default.
- Q34330293 label "Actinic microscope for extreme ultraviolet lithography photomask inspection and review" @default.
- Q34330293 label "Actinic microscope for extreme ultraviolet lithography photomask inspection and review" @default.
- Q34330293 label "Actinic microscope for extreme ultraviolet lithography photomask inspection and review" @default.
- Q34330293 prefLabel "Actinic microscope for extreme ultraviolet lithography photomask inspection and review" @default.
- Q34330293 prefLabel "Actinic microscope for extreme ultraviolet lithography photomask inspection and review" @default.
- Q34330293 prefLabel "Actinic microscope for extreme ultraviolet lithography photomask inspection and review" @default.
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- Q34330293 P698 22772266 @default.
- Q34330293 P1104 "+17" @default.
- Q34330293 P1433 Q3354459 @default.
- Q34330293 P1476 "Actinic microscope for extreme ultraviolet lithography photomask inspection and review" @default.
- Q34330293 P2093 "Michael Goldstein" @default.
- Q34330293 P2093 "Patrick Naulleau" @default.
- Q34330293 P304 "15752-15768" @default.
- Q34330293 P31 Q13442814 @default.
- Q34330293 P356 "10.1364/OE.20.015752" @default.
- Q34330293 P407 Q1860 @default.
- Q34330293 P433 "14" @default.
- Q34330293 P478 "20" @default.
- Q34330293 P577 "2012-07-01T00:00:00Z" @default.
- Q34330293 P698 "22772266" @default.