Matches in Wikidata for { <http://www.wikidata.org/entity/Q36353348> ?p ?o ?g. }
- Q36353348 description "2017 nî lūn-bûn" @default.
- Q36353348 description "2017年の論文" @default.
- Q36353348 description "2017年学术文章" @default.
- Q36353348 description "2017年学术文章" @default.
- Q36353348 description "2017年学术文章" @default.
- Q36353348 description "2017年学术文章" @default.
- Q36353348 description "2017年学术文章" @default.
- Q36353348 description "2017年學術文章" @default.
- Q36353348 description "2017年學術文章" @default.
- Q36353348 description "2017年學術文章" @default.
- Q36353348 description "2017年學術文章" @default.
- Q36353348 description "2017年學術文章" @default.
- Q36353348 description "2017年學術文章" @default.
- Q36353348 description "2017년 논문" @default.
- Q36353348 description "article científic" @default.
- Q36353348 description "article scientific" @default.
- Q36353348 description "article scientifique (publié 2017)" @default.
- Q36353348 description "articol științific" @default.
- Q36353348 description "articolo scientifico" @default.
- Q36353348 description "artigo científico (publicado na 2017)" @default.
- Q36353348 description "artigo científico (publicado na 2017)" @default.
- Q36353348 description "artigo científico" @default.
- Q36353348 description "artikull shkencor" @default.
- Q36353348 description "artikulong pang-agham" @default.
- Q36353348 description "artykuł naukowy" @default.
- Q36353348 description "artículo científico publicado en 2017" @default.
- Q36353348 description "artículu científicu espublizáu en 2017" @default.
- Q36353348 description "bilimsel makale" @default.
- Q36353348 description "bài báo khoa học" @default.
- Q36353348 description "mokslinis straipsnis" @default.
- Q36353348 description "naučni članak" @default.
- Q36353348 description "scienca artikolo" @default.
- Q36353348 description "scientific article" @default.
- Q36353348 description "teaduslik artikkel" @default.
- Q36353348 description "tieteellinen artikkeli" @default.
- Q36353348 description "tudományos cikk" @default.
- Q36353348 description "vedecký článok" @default.
- Q36353348 description "vetenskaplig artikel" @default.
- Q36353348 description "videnskabelig artikel (udgivet 2017)" @default.
- Q36353348 description "vitenskapelig artikkel" @default.
- Q36353348 description "vitskapeleg artikkel" @default.
- Q36353348 description "vědecký článek" @default.
- Q36353348 description "wetenschappelijk artikel" @default.
- Q36353348 description "wissenschaftlicher Artikel" @default.
- Q36353348 description "επιστημονικό άρθρο" @default.
- Q36353348 description "мақолаи илмӣ" @default.
- Q36353348 description "мақолаи илмӣ" @default.
- Q36353348 description "наукова стаття, опублікована у квітні 2017" @default.
- Q36353348 description "научна статия" @default.
- Q36353348 description "научная статья" @default.
- Q36353348 description "научни чланак" @default.
- Q36353348 description "научни чланак" @default.
- Q36353348 description "գիտական հոդված" @default.
- Q36353348 description "מאמר מדעי" @default.
- Q36353348 description "سائنسی مضمون" @default.
- Q36353348 description "مقالة علمية نشرت في أبريل 2017" @default.
- Q36353348 description "مقالهٔ علمی" @default.
- Q36353348 description "২০১৭-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q36353348 description "บทความทางวิทยาศาสตร์" @default.
- Q36353348 description "სამეცნიერო სტატია" @default.
- Q36353348 name "Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging." @default.
- Q36353348 name "Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging." @default.
- Q36353348 name "Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging." @default.
- Q36353348 type Item @default.
- Q36353348 label "Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging." @default.
- Q36353348 label "Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging." @default.
- Q36353348 label "Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging." @default.
- Q36353348 prefLabel "Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging." @default.
- Q36353348 prefLabel "Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging." @default.
- Q36353348 prefLabel "Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging." @default.
- Q36353348 P1433 Q36353348-C9B52381-42B2-43F9-9D38-A0E3D7B248D2 @default.
- Q36353348 P1476 Q36353348-04A6F221-4B8C-469C-A583-4838F6014D57 @default.
- Q36353348 P2093 Q36353348-1FF5A729-443C-46BE-8A24-B331020B34B0 @default.
- Q36353348 P2093 Q36353348-76A03D70-EAA9-4F43-AA39-A8FA7291A5FC @default.
- Q36353348 P2093 Q36353348-802E6D20-BD69-4CA4-96F5-A8338E121946 @default.
- Q36353348 P2093 Q36353348-A7802FDF-D88D-4236-B66D-CD5E486CE002 @default.
- Q36353348 P2093 Q36353348-C4C1F69F-C529-409E-AC8C-EBC2C23319BB @default.
- Q36353348 P304 Q36353348-5AB461BA-D504-4F74-909F-8FDC3FEDFC4E @default.
- Q36353348 P31 Q36353348-4B530F43-E379-4330-932E-3DC3B180690D @default.
- Q36353348 P356 Q36353348-971087D8-FB12-48B2-9E01-7E655896AC89 @default.
- Q36353348 P407 Q36353348-9742A29A-22E7-4669-A9D5-9912D7B2D2B6 @default.
- Q36353348 P433 Q36353348-CAC72C59-AA51-49E6-A055-C9FBC1CAFCB8 @default.
- Q36353348 P478 Q36353348-95A15CA2-42AF-4F62-A492-CD9E54B1A0C5 @default.
- Q36353348 P50 Q36353348-5C548635-5753-4E8A-B43B-4585696BC8BF @default.
- Q36353348 P50 Q36353348-E883EC8F-967E-46C0-BE97-EDFAD265AC22 @default.
- Q36353348 P577 Q36353348-78EFA07C-1F04-48FC-B64E-74EC8C684942 @default.
- Q36353348 P698 Q36353348-4E52C2F6-34E3-4E9F-BAF0-A48D6815A999 @default.
- Q36353348 P819 Q36353348-00C92DE4-ED03-4BCA-8766-F6BDD6F0F572 @default.
- Q36353348 P356 AO.56.003325 @default.
- Q36353348 P698 28430243 @default.
- Q36353348 P1433 Q4781557 @default.
- Q36353348 P1476 "Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging" @default.
- Q36353348 P2093 "Andy Neureuther" @default.
- Q36353348 P2093 "Eric M Gullikson" @default.
- Q36353348 P2093 "Markus Benk" @default.
- Q36353348 P2093 "Patrick P Naulleau" @default.
- Q36353348 P2093 "Yow-Gwo Wang" @default.
- Q36353348 P304 "3325-3328" @default.
- Q36353348 P31 Q13442814 @default.
- Q36353348 P356 "10.1364/AO.56.003325" @default.