Matches in Wikidata for { <http://www.wikidata.org/entity/Q37003777> ?p ?o ?g. }
Showing items 1 to 68 of
68
with 100 items per page.
- Q37003777 description "article científic" @default.
- Q37003777 description "article scientifique" @default.
- Q37003777 description "articolo scientifico" @default.
- Q37003777 description "artigo científico" @default.
- Q37003777 description "artículu científicu espublizáu en 1993" @default.
- Q37003777 description "bilimsel makale" @default.
- Q37003777 description "scientific article published on July 1993" @default.
- Q37003777 description "vedecký článok" @default.
- Q37003777 description "vetenskaplig artikel" @default.
- Q37003777 description "videnskabelig artikel" @default.
- Q37003777 description "vědecký článek" @default.
- Q37003777 description "wetenschappelijk artikel" @default.
- Q37003777 description "wissenschaftlicher Artikel" @default.
- Q37003777 description "наукова стаття, опублікована в липні 1993" @default.
- Q37003777 description "научни чланак" @default.
- Q37003777 description "مقالة علمية نشرت في يوليو 1993" @default.
- Q37003777 name "X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement" @default.
- Q37003777 name "X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement" @default.
- Q37003777 name "X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement" @default.
- Q37003777 type Item @default.
- Q37003777 label "X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement" @default.
- Q37003777 label "X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement" @default.
- Q37003777 label "X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement" @default.
- Q37003777 prefLabel "X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement" @default.
- Q37003777 prefLabel "X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement" @default.
- Q37003777 prefLabel "X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement" @default.
- Q37003777 P1433 Q37003777-0574E63F-DFB4-4AF1-BC99-F4984CAC1C5F @default.
- Q37003777 P1476 Q37003777-C6988B7C-A7C3-44D5-9E18-618F613945BC @default.
- Q37003777 P2093 Q37003777-3F09B943-B7C0-475E-8503-EA1994D3183C @default.
- Q37003777 P2093 Q37003777-4BD3A0F3-53CF-4769-BACA-37C78DB84AAE @default.
- Q37003777 P2093 Q37003777-97C5DFBD-1722-4EF4-A68E-A5608EF4FB8D @default.
- Q37003777 P2093 Q37003777-A79D88D1-1F0C-40C0-B2EB-17913186C1E4 @default.
- Q37003777 P2093 Q37003777-B8581D5C-EF53-446A-A2CA-B9E6B82E64E1 @default.
- Q37003777 P2093 Q37003777-FD05333B-E9B0-4919-B9C6-664249FCF8E0 @default.
- Q37003777 P2860 Q37003777-CF4FED80-9823-4B3D-8451-BA2F7A220B12 @default.
- Q37003777 P304 Q37003777-69A2C4FE-1AFF-4E69-9295-F78A6B002E51 @default.
- Q37003777 P31 Q37003777-92A24342-F7D2-4431-B470-365D3748853D @default.
- Q37003777 P356 Q37003777-07212B64-912C-4B70-B47D-10903BC757B8 @default.
- Q37003777 P433 Q37003777-31B7F4D0-1AA4-4E0A-B6D9-0A3CE5811B91 @default.
- Q37003777 P478 Q37003777-F5C56930-0BF7-4C3D-B1A2-BCCEF97ECC96 @default.
- Q37003777 P577 Q37003777-9F71EA50-B25D-4626-B47A-D482C2E7FE22 @default.
- Q37003777 P5875 Q37003777-C00FFB42-542F-4708-A3D1-2A76F053DD4C @default.
- Q37003777 P698 Q37003777-A754B15C-5237-48FE-8B0A-CD1810DF1F1A @default.
- Q37003777 P8608 Q37003777-5C8060ED-155F-435A-9C66-1D705B9B38A2 @default.
- Q37003777 P921 Q37003777-D01AE74F-5050-44D6-96CB-040A8C688B07 @default.
- Q37003777 P932 Q37003777-0CA52FD9-EA47-4530-B614-36D030412AC8 @default.
- Q37003777 P356 JRES.098.032 @default.
- Q37003777 P698 28053482 @default.
- Q37003777 P1433 Q2399998 @default.
- Q37003777 P1476 "X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth Measurement" @default.
- Q37003777 P2093 "Andras E Vladar" @default.
- Q37003777 P2093 "Egon Marx" @default.
- Q37003777 P2093 "Jeremiah R Lowney" @default.
- Q37003777 P2093 "Michael T Postek" @default.
- Q37003777 P2093 "Robert D Larrabee" @default.
- Q37003777 P2093 "William J Keery" @default.
- Q37003777 P2860 Q81776163 @default.
- Q37003777 P304 "415-445" @default.
- Q37003777 P31 Q13442814 @default.
- Q37003777 P356 "10.6028/JRES.098.032" @default.
- Q37003777 P433 "4" @default.
- Q37003777 P478 "98" @default.
- Q37003777 P577 "1993-07-01T00:00:00Z" @default.
- Q37003777 P5875 "269942656" @default.
- Q37003777 P698 "28053482" @default.
- Q37003777 P8608 "release_q6fp4egm3nfv3bzn7lpggye6cu" @default.
- Q37003777 P921 Q394 @default.
- Q37003777 P932 "4907699" @default.