Matches in Wikidata for { <http://www.wikidata.org/entity/Q45904404> ?p ?o ?g. }
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- Q45904404 description "2012 nî lūn-bûn" @default.
- Q45904404 description "2012年の論文" @default.
- Q45904404 description "2012年学术文章" @default.
- Q45904404 description "2012年学术文章" @default.
- Q45904404 description "2012年学术文章" @default.
- Q45904404 description "2012年学术文章" @default.
- Q45904404 description "2012年学术文章" @default.
- Q45904404 description "2012年学术文章" @default.
- Q45904404 description "2012年學術文章" @default.
- Q45904404 description "2012年學術文章" @default.
- Q45904404 description "2012年學術文章" @default.
- Q45904404 description "2012年學術文章" @default.
- Q45904404 description "2012年學術文章" @default.
- Q45904404 description "2012년 논문" @default.
- Q45904404 description "article científic" @default.
- Q45904404 description "article scientific" @default.
- Q45904404 description "article scientifique" @default.
- Q45904404 description "articol științific" @default.
- Q45904404 description "articolo scientifico" @default.
- Q45904404 description "artigo científico" @default.
- Q45904404 description "artigo científico" @default.
- Q45904404 description "artigo científico" @default.
- Q45904404 description "artikel ilmiah" @default.
- Q45904404 description "artikull shkencor" @default.
- Q45904404 description "artikulong pang-agham" @default.
- Q45904404 description "artykuł naukowy" @default.
- Q45904404 description "artículo científico publicado en 2012" @default.
- Q45904404 description "artículu científicu" @default.
- Q45904404 description "bilimsel makale" @default.
- Q45904404 description "bài báo khoa học" @default.
- Q45904404 description "naučni članak" @default.
- Q45904404 description "scienca artikolo" @default.
- Q45904404 description "scientific article published in December 2012" @default.
- Q45904404 description "scientific article published in December 2012" @default.
- Q45904404 description "scientific article published in December 2012" @default.
- Q45904404 description "teaduslik artikkel" @default.
- Q45904404 description "tieteellinen artikkeli" @default.
- Q45904404 description "tudományos cikk" @default.
- Q45904404 description "vedecký článok" @default.
- Q45904404 description "vetenskaplig artikel" @default.
- Q45904404 description "videnskabelig artikel" @default.
- Q45904404 description "vitenskapelig artikkel" @default.
- Q45904404 description "vitskapeleg artikkel" @default.
- Q45904404 description "vědecký článek" @default.
- Q45904404 description "wetenschappelijk artikel" @default.
- Q45904404 description "wissenschaftlicher Artikel" @default.
- Q45904404 description "επιστημονικό άρθρο" @default.
- Q45904404 description "мақолаи илмӣ" @default.
- Q45904404 description "наукова стаття, опублікована в грудні 2012" @default.
- Q45904404 description "научна статия" @default.
- Q45904404 description "научная статья" @default.
- Q45904404 description "научни чланак" @default.
- Q45904404 description "научни чланак" @default.
- Q45904404 description "מאמר מדעי" @default.
- Q45904404 description "مقالة علمية نشرت في ديسمبر 2012" @default.
- Q45904404 description "ডিসেম্বর ২০১২-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q45904404 description "บทความทางวิทยาศาสตร์" @default.
- Q45904404 description "სამეცნიერო სტატია" @default.
- Q45904404 name "Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry." @default.
- Q45904404 name "Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry." @default.
- Q45904404 type Item @default.
- Q45904404 label "Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry." @default.
- Q45904404 label "Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry." @default.
- Q45904404 prefLabel "Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry." @default.
- Q45904404 prefLabel "Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry." @default.
- Q45904404 P1433 Q45904404-D1316350-0145-412F-B20B-29AEF5F43A2C @default.
- Q45904404 P1476 Q45904404-7E25B0A0-0599-46AF-BF6C-C0850BB28BB9 @default.
- Q45904404 P2093 Q45904404-06F97988-8C8D-4A93-A319-056C0A7C99F0 @default.
- Q45904404 P2093 Q45904404-1C6B9BDB-6EFB-413D-86ED-EE524BDC000B @default.
- Q45904404 P2093 Q45904404-32343209-F331-4128-8D17-EAFC0D239F77 @default.
- Q45904404 P2093 Q45904404-AC0738E6-5526-4FC1-924E-88346B974702 @default.
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- Q45904404 P2093 Q45904404-FA6DDD62-EA23-4BDC-A77C-7E4281E7DB0C @default.
- Q45904404 P304 Q45904404-4FE40E1E-D7DC-4A8E-9049-755BEA94D678 @default.
- Q45904404 P31 Q45904404-4EF6613B-6B4B-4E2B-AA71-5721644FB470 @default.
- Q45904404 P356 Q45904404-FF6B79E5-4906-4379-B0F0-D9DCF9E11624 @default.
- Q45904404 P407 Q45904404-B6C58422-80EA-4D63-81F7-9C87F1CAF55A @default.
- Q45904404 P433 Q45904404-E9475FC5-0B6D-488B-9645-20D3620F8950 @default.
- Q45904404 P478 Q45904404-A0AD0D8A-7010-4215-9D02-8C4E39FFE13D @default.
- Q45904404 P577 Q45904404-C9506592-43D4-4752-8AA5-80BAAB71572A @default.
- Q45904404 P698 Q45904404-C53AD273-EE1F-471E-8730-3A3EAA4678C5 @default.
- Q45904404 P356 OL.37.005229 @default.
- Q45904404 P698 23258061 @default.
- Q45904404 P1433 Q7098918 @default.
- Q45904404 P1476 "Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry." @default.
- Q45904404 P2093 "Andreas Rathsfeld" @default.
- Q45904404 P2093 "Frank Scholze" @default.
- Q45904404 P2093 "Hermann Gross" @default.
- Q45904404 P2093 "Mark-Alexander Henn" @default.
- Q45904404 P2093 "Markus Bär" @default.
- Q45904404 P2093 "Sebastian Heidenreich" @default.
- Q45904404 P304 "5229-5231" @default.
- Q45904404 P31 Q13442814 @default.
- Q45904404 P356 "10.1364/OL.37.005229" @default.
- Q45904404 P407 Q1860 @default.
- Q45904404 P433 "24" @default.
- Q45904404 P478 "37" @default.
- Q45904404 P577 "2012-12-01T00:00:00Z" @default.
- Q45904404 P698 "23258061" @default.