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- Q49817285 description "2018 nî lūn-bûn" @default.
- Q49817285 description "2018年の論文" @default.
- Q49817285 description "2018年学术文章" @default.
- Q49817285 description "2018年学术文章" @default.
- Q49817285 description "2018年学术文章" @default.
- Q49817285 description "2018年学术文章" @default.
- Q49817285 description "2018年学术文章" @default.
- Q49817285 description "2018年学术文章" @default.
- Q49817285 description "2018年學術文章" @default.
- Q49817285 description "2018年學術文章" @default.
- Q49817285 description "2018年學術文章" @default.
- Q49817285 description "2018年學術文章" @default.
- Q49817285 description "2018年學術文章" @default.
- Q49817285 description "2018년 논문" @default.
- Q49817285 description "article científic" @default.
- Q49817285 description "article scientific" @default.
- Q49817285 description "article scientifique" @default.
- Q49817285 description "articol științific" @default.
- Q49817285 description "articolo scientifico" @default.
- Q49817285 description "artigo científico" @default.
- Q49817285 description "artigo científico" @default.
- Q49817285 description "artigo científico" @default.
- Q49817285 description "artikel ilmiah" @default.
- Q49817285 description "artikull shkencor" @default.
- Q49817285 description "artikulong pang-agham" @default.
- Q49817285 description "artykuł naukowy" @default.
- Q49817285 description "artículo científico publicado en 2018" @default.
- Q49817285 description "artículu científicu" @default.
- Q49817285 description "bilimsel makale" @default.
- Q49817285 description "bài báo khoa học" @default.
- Q49817285 description "naučni članak" @default.
- Q49817285 description "scienca artikolo" @default.
- Q49817285 description "scientific article published on 20 February 2018" @default.
- Q49817285 description "scientific article published on 20 February 2018" @default.
- Q49817285 description "scientific article published on 20 February 2018" @default.
- Q49817285 description "teaduslik artikkel" @default.
- Q49817285 description "tieteellinen artikkeli" @default.
- Q49817285 description "tudományos cikk" @default.
- Q49817285 description "vedecký článok" @default.
- Q49817285 description "vetenskaplig artikel" @default.
- Q49817285 description "videnskabelig artikel" @default.
- Q49817285 description "vitenskapelig artikkel" @default.
- Q49817285 description "vitskapeleg artikkel" @default.
- Q49817285 description "vědecký článek" @default.
- Q49817285 description "wetenschappelijk artikel" @default.
- Q49817285 description "wissenschaftlicher Artikel" @default.
- Q49817285 description "επιστημονικό άρθρο" @default.
- Q49817285 description "мақолаи илмӣ" @default.
- Q49817285 description "наукова стаття, опублікована в лютому 2018" @default.
- Q49817285 description "научна статия" @default.
- Q49817285 description "научная статья" @default.
- Q49817285 description "научни чланак" @default.
- Q49817285 description "научни чланак" @default.
- Q49817285 description "מאמר מדעי" @default.
- Q49817285 description "مقالة علمية نشرت في 20 فبراير 2018" @default.
- Q49817285 description "২০ ফেব্রুয়ারি ২০১৮-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q49817285 description "บทความทางวิทยาศาสตร์" @default.
- Q49817285 description "სამეცნიერო სტატია" @default.
- Q49817285 name "Novel cyclosilazane-type silicon precursor and two-step plasma for plasma-enhanced atomic layer deposition of silicon nitride." @default.
- Q49817285 name "Novel cyclosilazane-type silicon precursor and two-step plasma for plasma-enhanced atomic layer deposition of silicon nitride." @default.
- Q49817285 type Item @default.
- Q49817285 label "Novel cyclosilazane-type silicon precursor and two-step plasma for plasma-enhanced atomic layer deposition of silicon nitride." @default.
- Q49817285 label "Novel cyclosilazane-type silicon precursor and two-step plasma for plasma-enhanced atomic layer deposition of silicon nitride." @default.
- Q49817285 prefLabel "Novel cyclosilazane-type silicon precursor and two-step plasma for plasma-enhanced atomic layer deposition of silicon nitride." @default.
- Q49817285 prefLabel "Novel cyclosilazane-type silicon precursor and two-step plasma for plasma-enhanced atomic layer deposition of silicon nitride." @default.
- Q49817285 P1433 Q49817285-3EF69B0D-C88B-4ED6-BDBA-74F9673C540E @default.
- Q49817285 P1476 Q49817285-6A932226-20A2-457A-8E45-742BB79D35D0 @default.
- Q49817285 P2093 Q49817285-531BC409-E929-4E6C-B549-F391C60D10D1 @default.
- Q49817285 P2093 Q49817285-67A51236-F1DB-45DB-A5F3-395828336A74 @default.
- Q49817285 P2093 Q49817285-7AF00194-BF6E-4115-A933-6D51835254AD @default.
- Q49817285 P304 Q49817285-3B9BFC36-A390-44F3-AE38-FADCAAAD3E80 @default.
- Q49817285 P31 Q49817285-C3839599-A4DD-4A46-B2FB-0A08AB45F6AE @default.
- Q49817285 P356 Q49817285-57A9D1F5-D5E0-4276-B848-21AAD49CFE79 @default.
- Q49817285 P407 Q49817285-BC8ACB44-5302-440B-B86E-95546B893EC3 @default.
- Q49817285 P433 Q49817285-CC10496A-AECC-46E6-85FE-AA221E46CB77 @default.
- Q49817285 P478 Q49817285-3715CB34-E4CF-45BB-98D3-5A1EDB06B27F @default.
- Q49817285 P50 Q49817285-957FF320-5664-492F-81EE-10DAFBE3E543 @default.
- Q49817285 P577 Q49817285-41F4B55F-BF74-455E-AAB5-FC1B9A6C45E6 @default.
- Q49817285 P698 Q49817285-F0695A45-10CB-426E-B522-1FBE37306B6F @default.
- Q49817285 P356 ACSAMI.7B19741 @default.
- Q49817285 P698 29461032 @default.
- Q49817285 P1433 Q2819060 @default.
- Q49817285 P1476 "Novel Cyclosilazane-Type Silicon Precursor and Two-Step Plasma for Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride" @default.
- Q49817285 P2093 "Jae-Min Park" @default.
- Q49817285 P2093 "Sang-Ick Lee" @default.
- Q49817285 P2093 "Se Jin Jang" @default.
- Q49817285 P304 "9155-9163" @default.
- Q49817285 P31 Q13442814 @default.
- Q49817285 P356 "10.1021/ACSAMI.7B19741" @default.
- Q49817285 P407 Q1860 @default.
- Q49817285 P433 "10" @default.
- Q49817285 P478 "10" @default.
- Q49817285 P50 Q84684696 @default.
- Q49817285 P577 "2018-03-02T00:00:00Z" @default.
- Q49817285 P698 "29461032" @default.