Matches in Wikidata for { <http://www.wikidata.org/entity/Q50643108> ?p ?o ?g. }
- Q50643108 description "2016 nî lūn-bûn" @default.
- Q50643108 description "2016 ജൂണ് 29 നു പ്രസിദ്ധീകരിച്ച ശാസ്ത്ര ലേഖനം" @default.
- Q50643108 description "2016年の論文" @default.
- Q50643108 description "2016年学术文章" @default.
- Q50643108 description "2016年学术文章" @default.
- Q50643108 description "2016年学术文章" @default.
- Q50643108 description "2016年学术文章" @default.
- Q50643108 description "2016年学术文章" @default.
- Q50643108 description "2016年学术文章" @default.
- Q50643108 description "2016年學術文章" @default.
- Q50643108 description "2016年學術文章" @default.
- Q50643108 description "2016年學術文章" @default.
- Q50643108 description "2016年學術文章" @default.
- Q50643108 description "2016年學術文章" @default.
- Q50643108 description "2016년 논문" @default.
- Q50643108 description "article científic" @default.
- Q50643108 description "article scientific" @default.
- Q50643108 description "article scientifique" @default.
- Q50643108 description "articol științific" @default.
- Q50643108 description "articolo scientifico" @default.
- Q50643108 description "artigo científico" @default.
- Q50643108 description "artigo científico" @default.
- Q50643108 description "artigo científico" @default.
- Q50643108 description "artikel ilmiah" @default.
- Q50643108 description "artikull shkencor" @default.
- Q50643108 description "artikulong pang-agham" @default.
- Q50643108 description "artykuł naukowy" @default.
- Q50643108 description "artículo científico publicado en 2016" @default.
- Q50643108 description "artículu científicu" @default.
- Q50643108 description "bilimsel makale" @default.
- Q50643108 description "bài báo khoa học" @default.
- Q50643108 description "naučni članak" @default.
- Q50643108 description "scienca artikolo" @default.
- Q50643108 description "scientific article published on 13 June 2016" @default.
- Q50643108 description "scientific article published on 13 June 2016" @default.
- Q50643108 description "scientific article published on 13 June 2016" @default.
- Q50643108 description "teaduslik artikkel" @default.
- Q50643108 description "tieteellinen artikkeli" @default.
- Q50643108 description "tudományos cikk" @default.
- Q50643108 description "vedecký článok" @default.
- Q50643108 description "vetenskaplig artikel" @default.
- Q50643108 description "videnskabelig artikel" @default.
- Q50643108 description "vitenskapelig artikkel" @default.
- Q50643108 description "vitskapeleg artikkel" @default.
- Q50643108 description "vědecký článek" @default.
- Q50643108 description "wetenschappelijk artikel" @default.
- Q50643108 description "wissenschaftlicher Artikel" @default.
- Q50643108 description "επιστημονικό άρθρο" @default.
- Q50643108 description "мақолаи илмӣ" @default.
- Q50643108 description "наукова стаття, опублікована в червні 2016" @default.
- Q50643108 description "научна статия" @default.
- Q50643108 description "научная статья" @default.
- Q50643108 description "научни чланак" @default.
- Q50643108 description "научни чланак" @default.
- Q50643108 description "գիտական հոդված հրատարակված 2016 թվականի հունիսի 13-ին" @default.
- Q50643108 description "מאמר מדעי" @default.
- Q50643108 description "مقالة علمية نشرت في 13 يونيو 2016" @default.
- Q50643108 description "১৩ জুন ২০১৬-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q50643108 description "บทความทางวิทยาศาสตร์" @default.
- Q50643108 description "სამეცნიერო სტატია" @default.
- Q50643108 name "Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid." @default.
- Q50643108 name "Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid." @default.
- Q50643108 type Item @default.
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- Q50643108 label "Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid." @default.
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- Q50643108 prefLabel "Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid." @default.
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- Q50643108 P1476 "Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid" @default.
- Q50643108 P2093 "Anup L Dadlani" @default.
- Q50643108 P2093 "Fritz B Prinz" @default.
- Q50643108 P2093 "Hyo-Jin Kim" @default.
- Q50643108 P2093 "Joonsuk Park" @default.
- Q50643108 P2093 "Kihyun Kim" @default.
- Q50643108 P2093 "Stephen P Walch" @default.
- Q50643108 P2093 "Witchukorn Phuthong" @default.
- Q50643108 P2093 "Yongmin Kim" @default.
- Q50643108 P304 "17599-17605" @default.