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- Q51236966 description "2016 nî lūn-bûn" @default.
- Q51236966 description "2016年の論文" @default.
- Q51236966 description "2016年学术文章" @default.
- Q51236966 description "2016年学术文章" @default.
- Q51236966 description "2016年学术文章" @default.
- Q51236966 description "2016年学术文章" @default.
- Q51236966 description "2016年学术文章" @default.
- Q51236966 description "2016年学术文章" @default.
- Q51236966 description "2016年學術文章" @default.
- Q51236966 description "2016年學術文章" @default.
- Q51236966 description "2016年學術文章" @default.
- Q51236966 description "2016年學術文章" @default.
- Q51236966 description "2016年學術文章" @default.
- Q51236966 description "2016년 논문" @default.
- Q51236966 description "article científic" @default.
- Q51236966 description "article scientific" @default.
- Q51236966 description "article scientifique" @default.
- Q51236966 description "articol științific" @default.
- Q51236966 description "articolo scientifico" @default.
- Q51236966 description "artigo científico" @default.
- Q51236966 description "artigo científico" @default.
- Q51236966 description "artigo científico" @default.
- Q51236966 description "artikel ilmiah" @default.
- Q51236966 description "artikull shkencor" @default.
- Q51236966 description "artikulong pang-agham" @default.
- Q51236966 description "artykuł naukowy" @default.
- Q51236966 description "artículo científico publicado en 2016" @default.
- Q51236966 description "artículu científicu" @default.
- Q51236966 description "bilimsel makale" @default.
- Q51236966 description "bài báo khoa học" @default.
- Q51236966 description "naučni članak" @default.
- Q51236966 description "scienca artikolo" @default.
- Q51236966 description "scientific article published on 22 July 2016" @default.
- Q51236966 description "scientific article published on 22 July 2016" @default.
- Q51236966 description "scientific article published on 22 July 2016" @default.
- Q51236966 description "teaduslik artikkel" @default.
- Q51236966 description "tieteellinen artikkeli" @default.
- Q51236966 description "tudományos cikk" @default.
- Q51236966 description "vedecký článok" @default.
- Q51236966 description "vetenskaplig artikel" @default.
- Q51236966 description "videnskabelig artikel" @default.
- Q51236966 description "vitenskapelig artikkel" @default.
- Q51236966 description "vitskapeleg artikkel" @default.
- Q51236966 description "vědecký článek" @default.
- Q51236966 description "wetenschappelijk artikel" @default.
- Q51236966 description "wissenschaftlicher Artikel" @default.
- Q51236966 description "επιστημονικό άρθρο" @default.
- Q51236966 description "мақолаи илмӣ" @default.
- Q51236966 description "наукова стаття, опублікована в липні 2016" @default.
- Q51236966 description "научна статия" @default.
- Q51236966 description "научная статья" @default.
- Q51236966 description "научни чланак" @default.
- Q51236966 description "научни чланак" @default.
- Q51236966 description "מאמר מדעי" @default.
- Q51236966 description "مقالة علمية نشرت في 22 يوليو 2016" @default.
- Q51236966 description "২২ জুলাই ২০১৬-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q51236966 description "บทความทางวิทยาศาสตร์" @default.
- Q51236966 description "სამეცნიერო სტატია" @default.
- Q51236966 name "Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor." @default.
- Q51236966 name "Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor." @default.
- Q51236966 type Item @default.
- Q51236966 label "Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor." @default.
- Q51236966 label "Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor." @default.
- Q51236966 prefLabel "Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor." @default.
- Q51236966 prefLabel "Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor." @default.
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- Q51236966 P356 Q51236966-DD2248F5-F4C6-44F4-9D27-D2886AD11B89 @default.
- Q51236966 P407 Q51236966-6F5A142D-582D-478B-9985-9969D9FA0E7C @default.
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- Q51236966 P698 Q51236966-9AD990D1-904E-4EB2-8CA4-F1AB6A8B0A3A @default.
- Q51236966 P356 ACSAMI.6B06175 @default.
- Q51236966 P698 27447839 @default.
- Q51236966 P1433 Q2819060 @default.
- Q51236966 P1476 "Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor." @default.
- Q51236966 P2093 "Jae-Min Park" @default.
- Q51236966 P2093 "Luchana L Yusup" @default.
- Q51236966 P2093 "Sang-Ick Lee" @default.
- Q51236966 P2093 "Se Jin Jang" @default.
- Q51236966 P2093 "Won-Jun Lee" @default.
- Q51236966 P304 "20865-20871" @default.
- Q51236966 P31 Q13442814 @default.
- Q51236966 P356 "10.1021/ACSAMI.6B06175" @default.
- Q51236966 P407 Q1860 @default.
- Q51236966 P433 "32" @default.
- Q51236966 P478 "8" @default.
- Q51236966 P577 "2016-07-22T00:00:00Z" @default.
- Q51236966 P698 "27447839" @default.