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- Q51579432 description "2015 nî lūn-bûn" @default.
- Q51579432 description "2015年の論文" @default.
- Q51579432 description "2015年学术文章" @default.
- Q51579432 description "2015年学术文章" @default.
- Q51579432 description "2015年学术文章" @default.
- Q51579432 description "2015年学术文章" @default.
- Q51579432 description "2015年学术文章" @default.
- Q51579432 description "2015年学术文章" @default.
- Q51579432 description "2015年學術文章" @default.
- Q51579432 description "2015年學術文章" @default.
- Q51579432 description "2015年學術文章" @default.
- Q51579432 description "2015年學術文章" @default.
- Q51579432 description "2015年學術文章" @default.
- Q51579432 description "2015년 논문" @default.
- Q51579432 description "article científic" @default.
- Q51579432 description "article scientific" @default.
- Q51579432 description "article scientifique" @default.
- Q51579432 description "articol științific" @default.
- Q51579432 description "articolo scientifico" @default.
- Q51579432 description "artigo científico" @default.
- Q51579432 description "artigo científico" @default.
- Q51579432 description "artigo científico" @default.
- Q51579432 description "artikel ilmiah" @default.
- Q51579432 description "artikull shkencor" @default.
- Q51579432 description "artikulong pang-agham" @default.
- Q51579432 description "artykuł naukowy" @default.
- Q51579432 description "artículo científico publicado en 2015" @default.
- Q51579432 description "artículu científicu" @default.
- Q51579432 description "bilimsel makale" @default.
- Q51579432 description "bài báo khoa học" @default.
- Q51579432 description "naučni članak" @default.
- Q51579432 description "scienca artikolo" @default.
- Q51579432 description "scientific article published in December 2015" @default.
- Q51579432 description "scientific article published in December 2015" @default.
- Q51579432 description "scientific article published in December 2015" @default.
- Q51579432 description "teaduslik artikkel" @default.
- Q51579432 description "tieteellinen artikkeli" @default.
- Q51579432 description "tudományos cikk" @default.
- Q51579432 description "vedecký článok" @default.
- Q51579432 description "vetenskaplig artikel" @default.
- Q51579432 description "videnskabelig artikel" @default.
- Q51579432 description "vitenskapelig artikkel" @default.
- Q51579432 description "vitskapeleg artikkel" @default.
- Q51579432 description "vědecký článek" @default.
- Q51579432 description "wetenschappelijk artikel" @default.
- Q51579432 description "wissenschaftlicher Artikel" @default.
- Q51579432 description "επιστημονικό άρθρο" @default.
- Q51579432 description "мақолаи илмӣ" @default.
- Q51579432 description "наукова стаття, опублікована в грудні 2015" @default.
- Q51579432 description "научна статия" @default.
- Q51579432 description "научная статья" @default.
- Q51579432 description "научни чланак" @default.
- Q51579432 description "научни чланак" @default.
- Q51579432 description "מאמר מדעי" @default.
- Q51579432 description "مقالة علمية نشرت في ديسمبر 2015" @default.
- Q51579432 description "ডিসেম্বর ২০১৫-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q51579432 description "บทความทางวิทยาศาสตร์" @default.
- Q51579432 description "სამეცნიერო სტატია" @default.
- Q51579432 name "Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring." @default.
- Q51579432 name "Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring." @default.
- Q51579432 type Item @default.
- Q51579432 label "Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring." @default.
- Q51579432 label "Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring." @default.
- Q51579432 prefLabel "Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring." @default.
- Q51579432 prefLabel "Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring." @default.
- Q51579432 P1433 Q51579432-1FF28D53-328B-4807-A2B5-0E0BE66FF0BF @default.
- Q51579432 P1476 Q51579432-3803730D-0F39-4E7F-8C0F-C2021256F141 @default.
- Q51579432 P2093 Q51579432-3ABBCD1B-8A9E-4120-A1B7-E0C4BB5F84E3 @default.
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- Q51579432 P304 Q51579432-D1770392-7ECD-4BF6-82D3-393297792DD8 @default.
- Q51579432 P31 Q51579432-E2199068-D065-48F9-B44C-A490D6E1AA91 @default.
- Q51579432 P356 Q51579432-EE13D92B-0920-41FF-9FB7-29D885509B86 @default.
- Q51579432 P433 Q51579432-443B1788-4A9F-4016-B1B0-6553E62B78F8 @default.
- Q51579432 P478 Q51579432-465914BA-5A5B-47C3-BEDD-0EC45BC47AE7 @default.
- Q51579432 P577 Q51579432-EBB8825C-3A09-4846-86EB-577051F2A18F @default.
- Q51579432 P698 Q51579432-20E607B4-39F8-46A7-A7F0-8DAF9B452EFE @default.
- Q51579432 P356 1.4936770 @default.
- Q51579432 P698 26724022 @default.
- Q51579432 P1433 Q2364002 @default.
- Q51579432 P1476 "Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring." @default.
- Q51579432 P2093 "Chin-Wook Chung" @default.
- Q51579432 P2093 "Jin-Yong Kim" @default.
- Q51579432 P304 "123502" @default.
- Q51579432 P31 Q13442814 @default.
- Q51579432 P356 "10.1063/1.4936770" @default.
- Q51579432 P433 "12" @default.
- Q51579432 P478 "86" @default.
- Q51579432 P577 "2015-12-01T00:00:00Z" @default.
- Q51579432 P698 "26724022" @default.