Matches in Wikidata for { <http://www.wikidata.org/entity/Q53153439> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- Q53153439 description "2014 nî lūn-bûn" @default.
- Q53153439 description "2014年の論文" @default.
- Q53153439 description "2014年学术文章" @default.
- Q53153439 description "2014年学术文章" @default.
- Q53153439 description "2014年学术文章" @default.
- Q53153439 description "2014年学术文章" @default.
- Q53153439 description "2014年学术文章" @default.
- Q53153439 description "2014年学术文章" @default.
- Q53153439 description "2014年學術文章" @default.
- Q53153439 description "2014年學術文章" @default.
- Q53153439 description "2014年學術文章" @default.
- Q53153439 description "2014年學術文章" @default.
- Q53153439 description "2014年學術文章" @default.
- Q53153439 description "2014년 논문" @default.
- Q53153439 description "article científic" @default.
- Q53153439 description "article scientific" @default.
- Q53153439 description "article scientifique" @default.
- Q53153439 description "articol științific" @default.
- Q53153439 description "articolo scientifico" @default.
- Q53153439 description "artigo científico" @default.
- Q53153439 description "artigo científico" @default.
- Q53153439 description "artigo científico" @default.
- Q53153439 description "artikel ilmiah" @default.
- Q53153439 description "artikull shkencor" @default.
- Q53153439 description "artikulong pang-agham" @default.
- Q53153439 description "artykuł naukowy" @default.
- Q53153439 description "artículo científico publicado en 2014" @default.
- Q53153439 description "artículu científicu" @default.
- Q53153439 description "bilimsel makale" @default.
- Q53153439 description "bài báo khoa học" @default.
- Q53153439 description "naučni članak" @default.
- Q53153439 description "scienca artikolo" @default.
- Q53153439 description "scientific article published on 19 September 2014" @default.
- Q53153439 description "scientific article published on 19 September 2014" @default.
- Q53153439 description "scientific article published on 19 September 2014" @default.
- Q53153439 description "teaduslik artikkel" @default.
- Q53153439 description "tieteellinen artikkeli" @default.
- Q53153439 description "tudományos cikk" @default.
- Q53153439 description "vedecký článok" @default.
- Q53153439 description "vetenskaplig artikel" @default.
- Q53153439 description "videnskabelig artikel" @default.
- Q53153439 description "vitenskapelig artikkel" @default.
- Q53153439 description "vitskapeleg artikkel" @default.
- Q53153439 description "vědecký článek" @default.
- Q53153439 description "wetenschappelijk artikel" @default.
- Q53153439 description "wissenschaftlicher Artikel" @default.
- Q53153439 description "επιστημονικό άρθρο" @default.
- Q53153439 description "мақолаи илмӣ" @default.
- Q53153439 description "наукова стаття, опублікована у вересні 2014" @default.
- Q53153439 description "научна статия" @default.
- Q53153439 description "научная статья" @default.
- Q53153439 description "научни чланак" @default.
- Q53153439 description "научни чланак" @default.
- Q53153439 description "מאמר מדעי" @default.
- Q53153439 description "مقالة علمية نشرت في 19 سبتمبر 2014" @default.
- Q53153439 description "১৯ সেপ্টেম্বর ২০১৪-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q53153439 description "บทความทางวิทยาศาสตร์" @default.
- Q53153439 description "სამეცნიერო სტატია" @default.
- Q53153439 name "Deep etching of single- and polycrystalline silicon with high speed, high aspect ratio, high uniformity, and 3D complexity by electric bias-attenuated metal-assisted chemical etching (EMaCE)." @default.
- Q53153439 name "Deep etching of single- and polycrystalline silicon with high speed, high aspect ratio, high uniformity, and 3D complexity by electric bias-attenuated metal-assisted chemical etching (EMaCE)." @default.
- Q53153439 type Item @default.
- Q53153439 label "Deep etching of single- and polycrystalline silicon with high speed, high aspect ratio, high uniformity, and 3D complexity by electric bias-attenuated metal-assisted chemical etching (EMaCE)." @default.
- Q53153439 label "Deep etching of single- and polycrystalline silicon with high speed, high aspect ratio, high uniformity, and 3D complexity by electric bias-attenuated metal-assisted chemical etching (EMaCE)." @default.
- Q53153439 prefLabel "Deep etching of single- and polycrystalline silicon with high speed, high aspect ratio, high uniformity, and 3D complexity by electric bias-attenuated metal-assisted chemical etching (EMaCE)." @default.
- Q53153439 prefLabel "Deep etching of single- and polycrystalline silicon with high speed, high aspect ratio, high uniformity, and 3D complexity by electric bias-attenuated metal-assisted chemical etching (EMaCE)." @default.
- Q53153439 P1433 Q53153439-22886DB1-69EF-48A3-A839-5001D4A598A3 @default.
- Q53153439 P1476 Q53153439-7B53A9C2-5536-48BE-9C0A-DFC3B2DB723C @default.
- Q53153439 P2093 Q53153439-6BC3D709-F0D3-4859-9B0C-E3E052814125 @default.
- Q53153439 P2093 Q53153439-7060E5F3-EE83-4480-8671-094AFF4C6E4D @default.
- Q53153439 P2093 Q53153439-FAC7FD16-522F-4262-BBFE-376ABE6E29B3 @default.
- Q53153439 P304 Q53153439-D8015CDC-B042-429F-B9CA-1C98E92A233B @default.
- Q53153439 P31 Q53153439-9765038C-1171-4ECF-99DE-675DE4D87C99 @default.
- Q53153439 P356 Q53153439-71E07E39-E3FB-44F1-95F5-8F99429893F9 @default.
- Q53153439 P407 Q53153439-A4CD264A-8D66-40F8-B66F-F4E3685DD579 @default.
- Q53153439 P433 Q53153439-BB515827-D02A-4D38-97EC-5AF99B4FF0E4 @default.
- Q53153439 P478 Q53153439-29BDDB23-2739-407F-A782-614569A34FE1 @default.
- Q53153439 P577 Q53153439-882E9DB1-25E4-4230-AF13-B491EF91F6DC @default.
- Q53153439 P5875 Q53153439-96CE4CF1-7D50-4D42-93D5-1F348D56BEBB @default.
- Q53153439 P698 Q53153439-F87D9AEB-432F-4EE0-967C-466CB3C8B3D4 @default.
- Q53153439 P921 Q53153439-3389972D-D2C5-4DB6-B3F0-E7E7CDF45A34 @default.
- Q53153439 P356 AM504046B @default.
- Q53153439 P698 25188875 @default.
- Q53153439 P1433 Q2819060 @default.
- Q53153439 P1476 "Deep etching of single- and polycrystalline silicon with high speed, high aspect ratio, high uniformity, and 3D complexity by electric bias-attenuated metal-assisted chemical etching (EMaCE)." @default.
- Q53153439 P2093 "Ching-Ping Wong" @default.
- Q53153439 P2093 "Liyi Li" @default.
- Q53153439 P2093 "Xueying Zhao" @default.
- Q53153439 P304 "16782-16791" @default.
- Q53153439 P31 Q13442814 @default.
- Q53153439 P356 "10.1021/AM504046B" @default.
- Q53153439 P407 Q1860 @default.
- Q53153439 P433 "19" @default.
- Q53153439 P478 "6" @default.
- Q53153439 P577 "2014-09-19T00:00:00Z" @default.
- Q53153439 P5875 "265343522" @default.
- Q53153439 P698 "25188875" @default.
- Q53153439 P921 Q742736 @default.