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- Q53334320 description "2015 nî lūn-bûn" @default.
- Q53334320 description "2015年の論文" @default.
- Q53334320 description "2015年学术文章" @default.
- Q53334320 description "2015年学术文章" @default.
- Q53334320 description "2015年学术文章" @default.
- Q53334320 description "2015年学术文章" @default.
- Q53334320 description "2015年学术文章" @default.
- Q53334320 description "2015年学术文章" @default.
- Q53334320 description "2015年學術文章" @default.
- Q53334320 description "2015年學術文章" @default.
- Q53334320 description "2015年學術文章" @default.
- Q53334320 description "2015年學術文章" @default.
- Q53334320 description "2015年學術文章" @default.
- Q53334320 description "2015년 논문" @default.
- Q53334320 description "article científic" @default.
- Q53334320 description "article scientific" @default.
- Q53334320 description "article scientifique" @default.
- Q53334320 description "articol științific" @default.
- Q53334320 description "articolo scientifico" @default.
- Q53334320 description "artigo científico" @default.
- Q53334320 description "artigo científico" @default.
- Q53334320 description "artigo científico" @default.
- Q53334320 description "artikel ilmiah" @default.
- Q53334320 description "artikull shkencor" @default.
- Q53334320 description "artikulong pang-agham" @default.
- Q53334320 description "artykuł naukowy" @default.
- Q53334320 description "artículo científico publicado en 2015" @default.
- Q53334320 description "artículu científicu" @default.
- Q53334320 description "bilimsel makale" @default.
- Q53334320 description "bài báo khoa học" @default.
- Q53334320 description "naučni članak" @default.
- Q53334320 description "scienca artikolo" @default.
- Q53334320 description "scientific article published on 29 January 2015" @default.
- Q53334320 description "scientific article published on 29 January 2015" @default.
- Q53334320 description "scientific article published on 29 January 2015" @default.
- Q53334320 description "teaduslik artikkel" @default.
- Q53334320 description "tieteellinen artikkeli" @default.
- Q53334320 description "tudományos cikk" @default.
- Q53334320 description "vedecký článok" @default.
- Q53334320 description "vetenskaplig artikel" @default.
- Q53334320 description "videnskabelig artikel" @default.
- Q53334320 description "vitenskapelig artikkel" @default.
- Q53334320 description "vitskapeleg artikkel" @default.
- Q53334320 description "vědecký článek" @default.
- Q53334320 description "wetenschappelijk artikel" @default.
- Q53334320 description "wissenschaftlicher Artikel" @default.
- Q53334320 description "επιστημονικό άρθρο" @default.
- Q53334320 description "мақолаи илмӣ" @default.
- Q53334320 description "наукова стаття, опублікована в січні 2015" @default.
- Q53334320 description "научна статия" @default.
- Q53334320 description "научная статья" @default.
- Q53334320 description "научни чланак" @default.
- Q53334320 description "научни чланак" @default.
- Q53334320 description "מאמר מדעי" @default.
- Q53334320 description "مقالة علمية نشرت في 29 يناير 2015" @default.
- Q53334320 description "২৯ জানুয়ারি ২০১৫-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q53334320 description "บทความทางวิทยาศาสตร์" @default.
- Q53334320 description "სამეცნიერო სტატია" @default.
- Q53334320 name "Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride." @default.
- Q53334320 name "Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride." @default.
- Q53334320 type Item @default.
- Q53334320 label "Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride." @default.
- Q53334320 label "Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride." @default.
- Q53334320 prefLabel "Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride." @default.
- Q53334320 prefLabel "Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride." @default.
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- Q53334320 P356 NN507277F @default.
- Q53334320 P698 25604976 @default.
- Q53334320 P1433 Q2819067 @default.
- Q53334320 P1476 "Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride." @default.
- Q53334320 P2093 "Younghee Lee" @default.
- Q53334320 P304 "2061-2070" @default.
- Q53334320 P31 Q13442814 @default.
- Q53334320 P356 "10.1021/NN507277F" @default.
- Q53334320 P407 Q1860 @default.
- Q53334320 P433 "2" @default.
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- Q53334320 P50 Q29524416 @default.
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- Q53334320 P577 "2015-01-29T00:00:00Z" @default.
- Q53334320 P5875 "271334829" @default.
- Q53334320 P698 "25604976" @default.