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- Q53438100 description "2018 nî lūn-bûn" @default.
- Q53438100 description "2018年の論文" @default.
- Q53438100 description "2018年学术文章" @default.
- Q53438100 description "2018年学术文章" @default.
- Q53438100 description "2018年学术文章" @default.
- Q53438100 description "2018年学术文章" @default.
- Q53438100 description "2018年学术文章" @default.
- Q53438100 description "2018年学术文章" @default.
- Q53438100 description "2018年學術文章" @default.
- Q53438100 description "2018年學術文章" @default.
- Q53438100 description "2018年學術文章" @default.
- Q53438100 description "2018年學術文章" @default.
- Q53438100 description "2018年學術文章" @default.
- Q53438100 description "2018년 논문" @default.
- Q53438100 description "article científic" @default.
- Q53438100 description "article scientific" @default.
- Q53438100 description "article scientifique" @default.
- Q53438100 description "articol științific" @default.
- Q53438100 description "articolo scientifico" @default.
- Q53438100 description "artigo científico" @default.
- Q53438100 description "artigo científico" @default.
- Q53438100 description "artigo científico" @default.
- Q53438100 description "artikel ilmiah" @default.
- Q53438100 description "artikull shkencor" @default.
- Q53438100 description "artikulong pang-agham" @default.
- Q53438100 description "artykuł naukowy" @default.
- Q53438100 description "artículo científico publicado en 2018" @default.
- Q53438100 description "artículu científicu" @default.
- Q53438100 description "bilimsel makale" @default.
- Q53438100 description "bài báo khoa học" @default.
- Q53438100 description "naučni članak" @default.
- Q53438100 description "scienca artikolo" @default.
- Q53438100 description "scientific article published in March 2018" @default.
- Q53438100 description "scientific article published in March 2018" @default.
- Q53438100 description "scientific article published in March 2018" @default.
- Q53438100 description "teaduslik artikkel" @default.
- Q53438100 description "tieteellinen artikkeli" @default.
- Q53438100 description "tudományos cikk" @default.
- Q53438100 description "vedecký článok" @default.
- Q53438100 description "vetenskaplig artikel" @default.
- Q53438100 description "videnskabelig artikel" @default.
- Q53438100 description "vitenskapelig artikkel" @default.
- Q53438100 description "vitskapeleg artikkel" @default.
- Q53438100 description "vědecký článek" @default.
- Q53438100 description "wetenschappelijk artikel" @default.
- Q53438100 description "wissenschaftlicher Artikel" @default.
- Q53438100 description "επιστημονικό άρθρο" @default.
- Q53438100 description "мақолаи илмӣ" @default.
- Q53438100 description "наукова стаття, опублікована в березні 2018" @default.
- Q53438100 description "научна статия" @default.
- Q53438100 description "научная статья" @default.
- Q53438100 description "научни чланак" @default.
- Q53438100 description "научни чланак" @default.
- Q53438100 description "מאמר מדעי" @default.
- Q53438100 description "مقالة علمية نشرت في مارس 2018" @default.
- Q53438100 description "মার্চ ২০১৮-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q53438100 description "บทความทางวิทยาศาสตร์" @default.
- Q53438100 description "სამეცნიერო სტატია" @default.
- Q53438100 name "Extreme ultraviolet mask roughness effects in high numerical aperture lithography." @default.
- Q53438100 name "Extreme ultraviolet mask roughness effects in high numerical aperture lithography." @default.
- Q53438100 type Item @default.
- Q53438100 label "Extreme ultraviolet mask roughness effects in high numerical aperture lithography." @default.
- Q53438100 label "Extreme ultraviolet mask roughness effects in high numerical aperture lithography." @default.
- Q53438100 prefLabel "Extreme ultraviolet mask roughness effects in high numerical aperture lithography." @default.
- Q53438100 prefLabel "Extreme ultraviolet mask roughness effects in high numerical aperture lithography." @default.
- Q53438100 P1433 Q53438100-BDD8054C-11AA-4FBD-9564-146E2BAD6ACE @default.
- Q53438100 P1476 Q53438100-D6D46404-F03C-448A-A852-24647C07EBCD @default.
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- Q53438100 P304 Q53438100-445D6EFD-CE1B-46C5-A4C3-84923BE7D179 @default.
- Q53438100 P31 Q53438100-FEC0B7D0-DBD0-4E6F-9E92-7B4ADF3895CE @default.
- Q53438100 P356 Q53438100-04F9F065-B084-4678-A941-41B01781650D @default.
- Q53438100 P407 Q53438100-F26F4010-E827-4E71-B7EA-AD846091D912 @default.
- Q53438100 P433 Q53438100-CCB53B74-210A-4B48-8B48-DE5886BB0BD1 @default.
- Q53438100 P478 Q53438100-7EC784C7-E6D7-4001-92D3-6419F90CA34E @default.
- Q53438100 P577 Q53438100-4FC00535-2FF3-4630-9B2E-F03BFA760A6A @default.
- Q53438100 P698 Q53438100-02A70C35-E1D6-4AB0-8189-735BEAE6E92B @default.
- Q53438100 P819 Q53438100-E48181D5-B57A-4BAD-9A4D-F7A532AA1523 @default.
- Q53438100 P356 AO.57.001724 @default.
- Q53438100 P698 29522026 @default.
- Q53438100 P1433 Q4781557 @default.
- Q53438100 P1476 "Extreme ultraviolet mask roughness effects in high numerical aperture lithography." @default.
- Q53438100 P2093 "Patrick Naulleau" @default.
- Q53438100 P2093 "Tom Pistor" @default.
- Q53438100 P2093 "Yow-Gwo Wang" @default.
- Q53438100 P304 "1724-1730" @default.
- Q53438100 P31 Q13442814 @default.
- Q53438100 P356 "10.1364/AO.57.001724" @default.
- Q53438100 P407 Q1860 @default.
- Q53438100 P433 "7" @default.
- Q53438100 P478 "57" @default.
- Q53438100 P577 "2018-03-01T00:00:00Z" @default.
- Q53438100 P698 "29522026" @default.
- Q53438100 P819 "2018ApOpt..57.1724N" @default.