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- Q54020808 description "article scientifique publié en 2007" @default.
- Q54020808 description "im Januar 2007 veröffentlichter wissenschaftlicher Artikel" @default.
- Q54020808 description "wetenschappelijk artikel" @default.
- Q54020808 description "наукова стаття, опублікована в січні 2007" @default.
- Q54020808 name "Isotropic etching of silicon in fluorine gas for MEMS micromachining" @default.
- Q54020808 name "Isotropic etching of silicon in fluorine gas for MEMS micromachining" @default.
- Q54020808 type Item @default.
- Q54020808 label "Isotropic etching of silicon in fluorine gas for MEMS micromachining" @default.
- Q54020808 label "Isotropic etching of silicon in fluorine gas for MEMS micromachining" @default.
- Q54020808 prefLabel "Isotropic etching of silicon in fluorine gas for MEMS micromachining" @default.
- Q54020808 prefLabel "Isotropic etching of silicon in fluorine gas for MEMS micromachining" @default.
- Q54020808 P1433 Q54020808-B495A55B-5BA2-4A7C-BD95-9C6AD825EE55 @default.
- Q54020808 P1476 Q54020808-DE01F2D8-BBA9-4FB9-B63B-0DF51DF07865 @default.
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- Q54020808 P2093 Q54020808-536AD7BD-AF33-47CD-ADBE-B319C85ED4FC @default.
- Q54020808 P2093 Q54020808-9623703F-1956-46C3-A998-25EF3E524CA3 @default.
- Q54020808 P2093 Q54020808-A8692EBD-BC7B-474C-A904-889B50C5F630 @default.
- Q54020808 P2093 Q54020808-B8A1371A-1790-4667-AAD9-ADA3DA23D072 @default.
- Q54020808 P304 Q54020808-A0C32AEB-EF65-4241-96E6-CBF17FEDCF9F @default.
- Q54020808 P31 Q54020808-28C6DB44-FED3-470C-A57D-754475B46F82 @default.
- Q54020808 P356 Q54020808-9640FBB6-BA67-4EE3-97CD-E9CA5122E8EA @default.
- Q54020808 P433 Q54020808-29E521FA-018A-4D17-8BD6-E72755BA2D51 @default.
- Q54020808 P478 Q54020808-A3884E79-7076-4762-A0C7-04FBD8C7B04D @default.
- Q54020808 P50 Q54020808-043AE1A7-7DF5-494D-9B87-67EBDFB54E81 @default.
- Q54020808 P577 Q54020808-473A1C4E-8544-4DE8-A538-7C7F7056BBC5 @default.
- Q54020808 P356 026 @default.
- Q54020808 P1433 Q15708721 @default.
- Q54020808 P1476 "Isotropic etching of silicon in fluorine gas for MEMS micromachining" @default.
- Q54020808 P2093 "Aleksander J Franz" @default.
- Q54020808 P2093 "Leonel R Arana" @default.
- Q54020808 P2093 "Martin A Schmidt" @default.
- Q54020808 P2093 "Nuria de Mas" @default.
- Q54020808 P2093 "Raymond Schmidt" @default.
- Q54020808 P304 "384-392" @default.
- Q54020808 P31 Q13442814 @default.
- Q54020808 P356 "10.1088/0960-1317/17/2/026" @default.
- Q54020808 P433 "2" @default.
- Q54020808 P478 "17" @default.
- Q54020808 P50 Q30069671 @default.
- Q54020808 P577 "2007-01-25T00:00:00Z" @default.