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- Q55951684 description "im März 2011 veröffentlichter wissenschaftlicher Artikel" @default.
- Q55951684 description "wetenschappelijk artikel" @default.
- Q55951684 description "наукова стаття, опублікована в березні 2011" @default.
- Q55951684 name "Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices" @default.
- Q55951684 name "Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices" @default.
- Q55951684 type Item @default.
- Q55951684 label "Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices" @default.
- Q55951684 label "Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices" @default.
- Q55951684 prefLabel "Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices" @default.
- Q55951684 prefLabel "Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices" @default.
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- Q55951684 P356 ADFM.201002062 @default.
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- Q55951684 P1476 "Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices" @default.
- Q55951684 P2093 "D. Wolansky" @default.
- Q55951684 P2093 "E. Matthus" @default.
- Q55951684 P2093 "J. Drews" @default.
- Q55951684 P2093 "K. Schulz" @default.
- Q55951684 P2093 "K.-E. Ehwald" @default.
- Q55951684 P2093 "M. Fröhlich" @default.
- Q55951684 P2093 "M. Kaynak" @default.
- Q55951684 P2093 "P. Kulse" @default.
- Q55951684 P2093 "U. Haak" @default.
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- Q55951684 P304 "1652-1656" @default.
- Q55951684 P31 Q13442814 @default.
- Q55951684 P356 "10.1002/ADFM.201002062" @default.
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- Q55951684 P577 "2011-03-25T00:00:00Z" @default.
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