Matches in Wikidata for { <http://www.wikidata.org/entity/Q56135214> ?p ?o ?g. }
Showing items 1 to 46 of
46
with 100 items per page.
- Q56135214 description "article scientifique publié en 2003" @default.
- Q56135214 description "im Februar 2003 veröffentlichter wissenschaftlicher Artikel" @default.
- Q56135214 description "wetenschappelijk artikel" @default.
- Q56135214 description "наукова стаття, опублікована в лютому 2003" @default.
- Q56135214 name "Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition" @default.
- Q56135214 name "Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition" @default.
- Q56135214 type Item @default.
- Q56135214 label "Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition" @default.
- Q56135214 label "Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition" @default.
- Q56135214 prefLabel "Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition" @default.
- Q56135214 prefLabel "Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition" @default.
- Q56135214 P1433 Q56135214-16F985D2-869C-4AAF-A622-B64A55603E67 @default.
- Q56135214 P1476 Q56135214-D3BA10F7-93F9-4152-B68C-243EF85C1529 @default.
- Q56135214 P2093 Q56135214-08FBF5C8-C35B-48EC-A9E4-FF2E4C68A054 @default.
- Q56135214 P2093 Q56135214-100F99C2-A4E2-4D2B-AF72-47F246688BF4 @default.
- Q56135214 P2093 Q56135214-5A6A9A4B-32A0-47DE-B52F-202995DD15FD @default.
- Q56135214 P2093 Q56135214-63A1B390-9668-41CD-B68A-1E645B9B2BEF @default.
- Q56135214 P2093 Q56135214-D46635BB-740D-40AB-8507-A1B2B5B88BA3 @default.
- Q56135214 P2860 Q56135214-488E6A14-765F-4CE3-BEA7-1593F9F221AE @default.
- Q56135214 P2860 Q56135214-849E5B20-7ECF-49D7-B0A0-6513D60717DC @default.
- Q56135214 P304 Q56135214-20B1C2B0-CB1F-4722-BFFA-97706A3D9126 @default.
- Q56135214 P31 Q56135214-BBBAE490-6955-4D18-A21A-5DB5B4BE8F04 @default.
- Q56135214 P356 Q56135214-B5620E42-C22C-46BE-BEA6-1E6CB0F3E15C @default.
- Q56135214 P433 Q56135214-B66F7487-6A3D-4B48-A968-0E6FA318FE3B @default.
- Q56135214 P478 Q56135214-13745D04-D25F-410C-9A30-086056913FBE @default.
- Q56135214 P577 Q56135214-20B974A2-63CD-4DDF-AD90-3DB6297101B4 @default.
- Q56135214 P8608 Q56135214-EFD97AAB-AC8C-4948-8545-21E89377E7E5 @default.
- Q56135214 P921 Q56135214-6A69D3FF-D970-4FED-8339-506437EC0A39 @default.
- Q56135214 P356 S0254-0584(02)00375-9 @default.
- Q56135214 P1433 Q6786586 @default.
- Q56135214 P1476 "Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition" @default.
- Q56135214 P2093 "Chongmu Lee" @default.
- Q56135214 P2093 "Jaebum Kim" @default.
- Q56135214 P2093 "Jinho Lee" @default.
- Q56135214 P2093 "Ki-Young Oh" @default.
- Q56135214 P2093 "Kuntal Chakrabarti" @default.
- Q56135214 P2860 Q56135212 @default.
- Q56135214 P2860 Q57398048 @default.
- Q56135214 P304 "733-738" @default.
- Q56135214 P31 Q13442814 @default.
- Q56135214 P356 "10.1016/S0254-0584(02)00375-9" @default.
- Q56135214 P433 "3" @default.
- Q56135214 P478 "78" @default.
- Q56135214 P577 "2003-02-01T00:00:00Z" @default.
- Q56135214 P8608 "release_ujwffk4owvfkjltnt6tnctkd7y" @default.
- Q56135214 P921 Q1137203 @default.