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- Q56212948 description "article by Pongsak Kerdlapee et al published 21 May 2013 in Microsystem Technologies" @default.
- Q56212948 description "article scientifique publié en 2013" @default.
- Q56212948 description "im Mai 2013 veröffentlichter wissenschaftlicher Artikel" @default.
- Q56212948 description "wetenschappelijk artikel" @default.
- Q56212948 description "наукова стаття, опублікована в травні 2013" @default.
- Q56212948 name "Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process" @default.
- Q56212948 name "Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process" @default.
- Q56212948 type Item @default.
- Q56212948 label "Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process" @default.
- Q56212948 label "Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process" @default.
- Q56212948 prefLabel "Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process" @default.
- Q56212948 prefLabel "Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process" @default.
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- Q56212948 P1476 Q56212948-D9CA3A89-02FA-4469-9997-E9C0A5DE10F3 @default.
- Q56212948 P2093 Q56212948-17C7FEE0-E22A-43D7-AC27-739A02AC24C9 @default.
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- Q56212948 P2093 Q56212948-69E18A9E-1A03-4689-86CD-C9727007E397 @default.
- Q56212948 P2093 Q56212948-BFE2D03B-CEB3-4C7D-AF13-0191D4CD6324 @default.
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- Q56212948 P2888 Q56212948-9AC3E05E-56CB-4956-994B-2B8AB01A6FA4 @default.
- Q56212948 P304 Q56212948-4084E54D-C021-4907-A57E-A9277FF16124 @default.
- Q56212948 P31 Q56212948-BF1BCCE8-7CB9-4A1A-80CD-E0498D078B75 @default.
- Q56212948 P356 Q56212948-863E1C77-B02C-4708-B760-569CB5BB4574 @default.
- Q56212948 P433 Q56212948-E72D6A66-A89B-44D6-9EE6-24B04DEBE93A @default.
- Q56212948 P478 Q56212948-5B99DD82-FC93-42BE-87D7-8453C5774424 @default.
- Q56212948 P577 Q56212948-18971C02-E1A0-414C-A4F4-872C1EF8FEE4 @default.
- Q56212948 P5875 Q56212948-5F13F6F1-3AC5-4646-87AB-ABA41FBEA932 @default.
- Q56212948 P356 S00542-013-1816-X @default.
- Q56212948 P1433 Q2213041 @default.
- Q56212948 P1476 "Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process" @default.
- Q56212948 P2093 "Adisorn Tuantranont" @default.
- Q56212948 P2093 "Anurat Wisitsoraat" @default.
- Q56212948 P2093 "Ditsayuth Phokaratkul" @default.
- Q56212948 P2093 "Komgrit Leksakul" @default.
- Q56212948 P2093 "Pongsak Kerdlapee" @default.
- Q56212948 P2093 "Rungreung Phatthanakun" @default.
- Q56212948 P2888 s00542-013-1816-x @default.
- Q56212948 P304 "127-135" @default.
- Q56212948 P31 Q13442814 @default.
- Q56212948 P356 "10.1007/S00542-013-1816-X" @default.
- Q56212948 P433 "1" @default.
- Q56212948 P478 "20" @default.
- Q56212948 P577 "2013-05-21T00:00:00Z" @default.
- Q56212948 P5875 "257440053" @default.