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- Q56984365 description "artículu científicu espublizáu en xunetu de 2018" @default.
- Q56984365 description "im Oktober 2018 veröffentlichter wissenschaftlicher Artikel" @default.
- Q56984365 description "scientific article published on 16 July 2018" @default.
- Q56984365 description "wetenschappelijk artikel" @default.
- Q56984365 description "наукова стаття, опублікована в жовтні 2018" @default.
- Q56984365 name "Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features" @default.
- Q56984365 name "Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features" @default.
- Q56984365 type Item @default.
- Q56984365 label "Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features" @default.
- Q56984365 label "Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features" @default.
- Q56984365 prefLabel "Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features" @default.
- Q56984365 prefLabel "Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features" @default.
- Q56984365 P1433 Q56984365-8404AB7D-421C-41BA-BBBC-64FE9F1FA680 @default.
- Q56984365 P1476 Q56984365-EB7372A3-FD76-48CC-908A-CFA34D56D6AD @default.
- Q56984365 P2093 Q56984365-5B4A8083-D6DE-4879-BA07-62375175D307 @default.
- Q56984365 P2093 Q56984365-AE522F5C-C4C2-43F7-8DBE-60C4DDEA6A8D @default.
- Q56984365 P2093 Q56984365-AF0A3362-F2C8-4301-8DAC-80F15ADDFD35 @default.
- Q56984365 P2093 Q56984365-CF1F8C08-0989-435A-A5EF-9A2A11482B46 @default.
- Q56984365 P2093 Q56984365-DA279196-0702-4CF9-AD20-9C8FD5F7094B @default.
- Q56984365 P304 Q56984365-0F62BC67-11D4-4C6F-8824-D22A1A31D99A @default.
- Q56984365 P31 Q56984365-14C525DB-8E47-4B24-88FC-623DB7DDF3CF @default.
- Q56984365 P356 Q56984365-7E619D1B-6883-4BDC-95F8-D4A787992CED @default.
- Q56984365 P407 Q56984365-5EDEA321-6E0A-4A59-9C2F-B9403B54F22F @default.
- Q56984365 P433 Q56984365-D5A17DAE-DC20-4743-9E17-03563DC899CB @default.
- Q56984365 P478 Q56984365-CA2B57DB-A666-4618-A7A1-5B08E51BAD95 @default.
- Q56984365 P50 Q56984365-046663C6-FB41-47DA-BD05-11E3953F74A9 @default.
- Q56984365 P50 Q56984365-977A129A-548E-472D-AC04-F1BF5F5574BC @default.
- Q56984365 P50 Q56984365-DBA868B6-E68C-4419-A504-4B04C9CCDA32 @default.
- Q56984365 P577 Q56984365-EF94D5F9-4C72-4183-8F70-8366376045E1 @default.
- Q56984365 P698 Q56984365-72751069-9871-4CEE-8233-F2C153FCC341 @default.
- Q56984365 P921 Q56984365-68f16f1c-4bae-4074-877d-47ca239ec581 @default.
- Q56984365 P356 AAD393 @default.
- Q56984365 P698 30010091 @default.
- Q56984365 P1433 Q972896 @default.
- Q56984365 P1476 "Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features" @default.
- Q56984365 P2093 "Adam Schwartzberg" @default.
- Q56984365 P2093 "Ivo W Rangelow" @default.
- Q56984365 P2093 "Kim Y Lee" @default.
- Q56984365 P2093 "Stefano Cabrini" @default.
- Q56984365 P2093 "XiaoMin Yang" @default.
- Q56984365 P304 "405302" @default.
- Q56984365 P31 Q13442814 @default.
- Q56984365 P356 "10.1088/1361-6528/AAD393" @default.
- Q56984365 P407 Q1860 @default.
- Q56984365 P433 "40" @default.
- Q56984365 P478 "29" @default.
- Q56984365 P50 Q104039074 @default.
- Q56984365 P50 Q88294003 @default.
- Q56984365 P50 Q90231302 @default.
- Q56984365 P577 "2018-07-16T00:00:00Z" @default.
- Q56984365 P698 "30010091" @default.
- Q56984365 P921 Q716 @default.