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- Q57086984 description "article scientifique publié en 2010" @default.
- Q57086984 description "wetenschappelijk artikel" @default.
- Q57086984 description "наукова стаття, опублікована в травні 2010" @default.
- Q57086984 name "Novel SU-8 based vacuum wafer-level packaging for MEMS devices" @default.
- Q57086984 name "Novel SU-8 based vacuum wafer-level packaging for MEMS devices" @default.
- Q57086984 type Item @default.
- Q57086984 label "Novel SU-8 based vacuum wafer-level packaging for MEMS devices" @default.
- Q57086984 label "Novel SU-8 based vacuum wafer-level packaging for MEMS devices" @default.
- Q57086984 prefLabel "Novel SU-8 based vacuum wafer-level packaging for MEMS devices" @default.
- Q57086984 prefLabel "Novel SU-8 based vacuum wafer-level packaging for MEMS devices" @default.
- Q57086984 P1433 Q57086984-BD6CCA1C-261B-4C07-BC2F-E699AA801B30 @default.
- Q57086984 P1476 Q57086984-674EE7EA-9174-4BDE-9B9B-9A2515579053 @default.
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- Q57086984 P2093 Q57086984-7B758659-0F44-44EA-91FE-9231335AF88A @default.
- Q57086984 P2093 Q57086984-868CF0CD-2C9A-421D-A721-5D7AEE772DCF @default.
- Q57086984 P304 Q57086984-AB05C0A1-C0F7-4AF1-88A8-F85301C77A01 @default.
- Q57086984 P31 Q57086984-23A6E1C3-AE26-498D-8241-E5F661A056A5 @default.
- Q57086984 P356 Q57086984-ED4DEA2F-1EA8-42AB-A5B3-9FCF62AABCF6 @default.
- Q57086984 P433 Q57086984-F55DBFD6-4685-424E-A9C3-B958CE176E5E @default.
- Q57086984 P478 Q57086984-BC3ACFE4-125D-46A6-A204-26FCE8BB8DF8 @default.
- Q57086984 P50 Q57086984-38246222-EEB3-4494-95E2-123078C3A405 @default.
- Q57086984 P50 Q57086984-46146754-E3D3-47B4-AB98-EE71F781D8BA @default.
- Q57086984 P50 Q57086984-4C3A5F1D-34BA-416C-9FB8-3B5B8023DB4C @default.
- Q57086984 P50 Q57086984-A7C9D004-1190-48AE-8543-389088F9A63B @default.
- Q57086984 P50 Q57086984-BB691B96-642A-4DDA-9917-F49E71E3AE4B @default.
- Q57086984 P50 Q57086984-BF244A4D-5307-48EF-89B3-6509CF0C6824 @default.
- Q57086984 P577 Q57086984-1138267D-CB2A-4C71-8F20-3361B8DBF505 @default.
- Q57086984 P356 J.MEE.2009.12.048 @default.
- Q57086984 P1433 Q2615776 @default.
- Q57086984 P1476 "Novel SU-8 based vacuum wafer-level packaging for MEMS devices" @default.
- Q57086984 P2093 "Jordi Agusti" @default.
- Q57086984 P2093 "Nadine Noeth" @default.
- Q57086984 P2093 "Zachary J. Davis" @default.
- Q57086984 P304 "1173-1176" @default.
- Q57086984 P31 Q13442814 @default.
- Q57086984 P356 "10.1016/J.MEE.2009.12.048" @default.
- Q57086984 P433 "5-8" @default.
- Q57086984 P478 "87" @default.
- Q57086984 P50 Q21253695 @default.
- Q57086984 P50 Q43142908 @default.
- Q57086984 P50 Q57925999 @default.
- Q57086984 P50 Q59566455 @default.
- Q57086984 P50 Q59566458 @default.
- Q57086984 P50 Q60531734 @default.
- Q57086984 P577 "2010-05-01T00:00:00Z" @default.