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- Q57087199 description "scholarly article published 29 April 2003" @default.
- Q57087199 description "wetenschappelijk artikel" @default.
- Q57087199 description "наукова стаття, опублікована у квітні 2003" @default.
- Q57087199 name "Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems" @default.
- Q57087199 name "Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems" @default.
- Q57087199 type Item @default.
- Q57087199 label "Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems" @default.
- Q57087199 label "Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems" @default.
- Q57087199 prefLabel "Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems" @default.
- Q57087199 prefLabel "Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems" @default.
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- Q57087199 P356 12.501262 @default.
- Q57087199 P1476 "Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems" @default.
- Q57087199 P2093 "Cristina Martin" @default.
- Q57087199 P2093 "Esko Forsen" @default.
- Q57087199 P2093 "Migdong Dong" @default.
- Q57087199 P2093 "Nria Barniol" @default.
- Q57087199 P2093 "Xavier Borrise" @default.
- Q57087199 P2093 "Zachary Davis" @default.
- Q57087199 P31 Q13442814 @default.
- Q57087199 P356 "10.1117/12.501262" @default.
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- Q57087199 P577 "2003-04-29T00:00:00Z" @default.
- Q57087199 P921 Q663 @default.