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- Q57256300 description "article scientifique publié en 2004" @default.
- Q57256300 description "wetenschappelijk artikel" @default.
- Q57256300 description "наукова стаття, опублікована в травні 2004" @default.
- Q57256300 name "Implications of immersion lithography on 193-nm photoresists" @default.
- Q57256300 name "Implications of immersion lithography on 193-nm photoresists" @default.
- Q57256300 type Item @default.
- Q57256300 label "Implications of immersion lithography on 193-nm photoresists" @default.
- Q57256300 label "Implications of immersion lithography on 193-nm photoresists" @default.
- Q57256300 prefLabel "Implications of immersion lithography on 193-nm photoresists" @default.
- Q57256300 prefLabel "Implications of immersion lithography on 193-nm photoresists" @default.
- Q57256300 P1476 Q57256300-63B50D19-CB07-4718-AA41-47E05CCE0791 @default.
- Q57256300 P2093 Q57256300-60728A1E-96F7-437B-BD26-6CD8115A8499 @default.
- Q57256300 P2093 Q57256300-81FC2BAA-5879-4CD2-84F8-6816174ECDC2 @default.
- Q57256300 P2093 Q57256300-952F4C12-7AA9-4A8E-9FF0-88877D32A714 @default.
- Q57256300 P2093 Q57256300-A825746C-E0BE-432F-A5BD-E2FD2DDAC24A @default.
- Q57256300 P2093 Q57256300-BEE067C3-7DA6-4414-BD37-36D0A53E9A42 @default.
- Q57256300 P2093 Q57256300-D63C98AF-BE7B-4087-BB1F-0805B72EE2D5 @default.
- Q57256300 P2093 Q57256300-F0A74A39-2901-45BC-A42E-2B2C05502EC4 @default.
- Q57256300 P31 Q57256300-DD923902-AA61-45F7-8200-2DF730DF5361 @default.
- Q57256300 P356 Q57256300-8B562A73-4608-44C5-8A5C-ABAB54E2C814 @default.
- Q57256300 P577 Q57256300-2AA1A7B6-0883-42B1-9425-22FA3F14D086 @default.
- Q57256300 P356 12.535875 @default.
- Q57256300 P1476 "Implications of immersion lithography on 193-nm photoresists" @default.
- Q57256300 P2093 "C. G. Willson" @default.
- Q57256300 P2093 "Charles R. Chambers" @default.
- Q57256300 P2093 "J. Christopher Taylor" @default.
- Q57256300 P2093 "Robert J. LeSuer" @default.
- Q57256300 P2093 "Ryan Deschner" @default.
- Q57256300 P2093 "Sean D. Burns" @default.
- Q57256300 P2093 "Willard E. Conley" @default.
- Q57256300 P31 Q13442814 @default.
- Q57256300 P356 "10.1117/12.535875" @default.
- Q57256300 P577 "2004-05-14T00:00:00Z" @default.