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- Q57272800 description "article scientifique publié en 2002" @default.
- Q57272800 description "im Jahr 2002 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57272800 description "wetenschappelijk artikel" @default.
- Q57272800 description "наукова стаття, опублікована у 2002" @default.
- Q57272800 name "Digital electrostatic electron-beam array lithography" @default.
- Q57272800 name "Digital electrostatic electron-beam array lithography" @default.
- Q57272800 type Item @default.
- Q57272800 label "Digital electrostatic electron-beam array lithography" @default.
- Q57272800 label "Digital electrostatic electron-beam array lithography" @default.
- Q57272800 prefLabel "Digital electrostatic electron-beam array lithography" @default.
- Q57272800 prefLabel "Digital electrostatic electron-beam array lithography" @default.
- Q57272800 P1433 Q57272800-D2F290E0-5EC6-44BE-A0EB-30A501F2EB54 @default.
- Q57272800 P1476 Q57272800-CA9BCB27-D453-4D99-95BF-B8A0A9D811B1 @default.
- Q57272800 P2093 Q57272800-163429A9-FE3A-47E2-8C81-EB4765FB1328 @default.
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- Q57272800 P31 Q57272800-12FCB8A4-79FA-45AD-AC8B-8AB6E1609926 @default.
- Q57272800 P356 Q57272800-4F2375BB-CF9A-4A84-BF5B-0C6A3B0C682B @default.
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- Q57272800 P478 Q57272800-42A49D34-6A39-4E54-9A80-15087E983F02 @default.
- Q57272800 P577 Q57272800-ABFCB516-9B3F-4030-9377-6925BAE29F25 @default.
- Q57272800 P356 1.1520559 @default.
- Q57272800 P1433 Q29043658 @default.
- Q57272800 P1476 "Digital electrostatic electron-beam array lithography" @default.
- Q57272800 P2093 "A. V. Melechko" @default.
- Q57272800 P2093 "C. E. Thomas" @default.
- Q57272800 P2093 "D. H. Lowndes" @default.
- Q57272800 P2093 "D. K. Hensley" @default.
- Q57272800 P2093 "E. D. Ellis" @default.
- Q57272800 P2093 "J. H. Whealton" @default.
- Q57272800 P2093 "L. R. Baylor" @default.
- Q57272800 P2093 "M. A. Guillorn" @default.
- Q57272800 P2093 "M. L. Simpson" @default.
- Q57272800 P2093 "V. I. Merkulov" @default.
- Q57272800 P304 "2646" @default.
- Q57272800 P31 Q13442814 @default.
- Q57272800 P356 "10.1116/1.1520559" @default.
- Q57272800 P433 "6" @default.
- Q57272800 P478 "20" @default.
- Q57272800 P577 "2002-01-01T00:00:00Z" @default.