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- Q57369687 description "article scientifique publié en 2018" @default.
- Q57369687 description "im Jahr 2018 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57369687 description "wetenschappelijk artikel" @default.
- Q57369687 description "наукова стаття, опублікована у 2018" @default.
- Q57369687 name "Healing surface roughness of lithographic nanopatterns through sub-10 nm aqueous-dispersible polymeric particles with excellent dry etch durability" @default.
- Q57369687 name "Healing surface roughness of lithographic nanopatterns through sub-10 nm aqueous-dispersible polymeric particles with excellent dry etch durability" @default.
- Q57369687 type Item @default.
- Q57369687 label "Healing surface roughness of lithographic nanopatterns through sub-10 nm aqueous-dispersible polymeric particles with excellent dry etch durability" @default.
- Q57369687 label "Healing surface roughness of lithographic nanopatterns through sub-10 nm aqueous-dispersible polymeric particles with excellent dry etch durability" @default.
- Q57369687 prefLabel "Healing surface roughness of lithographic nanopatterns through sub-10 nm aqueous-dispersible polymeric particles with excellent dry etch durability" @default.
- Q57369687 prefLabel "Healing surface roughness of lithographic nanopatterns through sub-10 nm aqueous-dispersible polymeric particles with excellent dry etch durability" @default.
- Q57369687 P1433 Q57369687-3842FA99-D656-4E89-8408-CFB30F4218A8 @default.
- Q57369687 P1476 Q57369687-4B856FF1-6DC5-436F-A0DC-95686BFD7FF3 @default.
- Q57369687 P2093 Q57369687-00610BBD-C614-4F30-A7F1-0BD07D2CEA9E @default.
- Q57369687 P2093 Q57369687-81FAA594-1BB4-46E1-8C17-1C893DEF8B1B @default.
- Q57369687 P2093 Q57369687-9A7029B9-5B0F-4877-9C27-67E20613DC04 @default.
- Q57369687 P2093 Q57369687-BB2ACFB1-B0DB-4F1F-A6F8-8D9D0FBF4FB5 @default.
- Q57369687 P304 Q57369687-00B43DE9-FD69-4F70-AE06-679B4FE83D64 @default.
- Q57369687 P31 Q57369687-9F5A2BBE-E084-4125-A06C-2D5C52EB4B32 @default.
- Q57369687 P356 Q57369687-FA8A4F98-2F09-466C-BBD1-C96B1DF55634 @default.
- Q57369687 P433 Q57369687-53C2AB05-A70E-4AC2-AEA3-ED0B62ACAB09 @default.
- Q57369687 P478 Q57369687-A438E47C-1990-45A0-A475-F766AB3FF3AA @default.
- Q57369687 P577 Q57369687-BD723AAE-B40C-495C-8F6C-3F5A6526D5D0 @default.
- Q57369687 P356 C8ME00007G @default.
- Q57369687 P1433 Q27727475 @default.
- Q57369687 P1476 "Healing surface roughness of lithographic nanopatterns through sub-10 nm aqueous-dispersible polymeric particles with excellent dry etch durability" @default.
- Q57369687 P2093 "Andrew K. Whittaker" @default.
- Q57369687 P2093 "Han-Hao Cheng" @default.
- Q57369687 P2093 "Idriss Blakey" @default.
- Q57369687 P2093 "Zhen Jiang" @default.
- Q57369687 P304 "627-635" @default.
- Q57369687 P31 Q13442814 @default.
- Q57369687 P356 "10.1039/C8ME00007G" @default.
- Q57369687 P433 "4" @default.
- Q57369687 P478 "3" @default.
- Q57369687 P577 "2018-01-01T00:00:00Z" @default.