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- Q57387332 description "scholarly article by Maria Berdova et al published April 2016 in Applied Surface Science" @default.
- Q57387332 description "wetenschappelijk artikel" @default.
- Q57387332 description "наукова стаття, опублікована у квітні 2016" @default.
- Q57387332 name "Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications" @default.
- Q57387332 name "Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications" @default.
- Q57387332 type Item @default.
- Q57387332 label "Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications" @default.
- Q57387332 label "Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications" @default.
- Q57387332 prefLabel "Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications" @default.
- Q57387332 prefLabel "Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications" @default.
- Q57387332 P1433 Q57387332-E14E4DFB-EF47-4710-B5CA-5765AE924200 @default.
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- Q57387332 P31 Q57387332-2367DC11-A75E-412E-88F1-3F4ED7620A68 @default.
- Q57387332 P356 Q57387332-0629F287-6816-4A47-B23C-787D31855A31 @default.
- Q57387332 P478 Q57387332-16F0C345-9235-43B2-91CD-623844370C20 @default.
- Q57387332 P50 Q57387332-48C12C4B-B98D-436B-8C18-9E676BDB9CAF @default.
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- Q57387332 P577 Q57387332-A35B3ED4-1056-4B0E-8E6A-36F446199E32 @default.
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- Q57387332 P921 Q57387332-E96CB075-401D-48C6-AFA3-05B4A59D8ED3 @default.
- Q57387332 P356 J.APSUSC.2016.01.216 @default.
- Q57387332 P1433 Q2772524 @default.
- Q57387332 P1476 "Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications" @default.
- Q57387332 P2093 "Alessio Lamperti" @default.
- Q57387332 P2093 "Grazia Tallarida" @default.
- Q57387332 P2093 "Luca Lamagna" @default.
- Q57387332 P2093 "Marco Fanciulli" @default.
- Q57387332 P2093 "Maria Berdova" @default.
- Q57387332 P2093 "Roberto Somaschini" @default.
- Q57387332 P2093 "Salvatore Gioveni" @default.
- Q57387332 P2093 "Sami Franssila" @default.
- Q57387332 P2093 "Silvia Rossini" @default.
- Q57387332 P2093 "Stefano Losa" @default.
- Q57387332 P304 "470-476" @default.
- Q57387332 P31 Q13442814 @default.
- Q57387332 P356 "10.1016/J.APSUSC.2016.01.216" @default.
- Q57387332 P478 "368" @default.
- Q57387332 P50 Q57385737 @default.
- Q57387332 P50 Q57387490 @default.
- Q57387332 P577 "2016-04-01T00:00:00Z" @default.
- Q57387332 P921 Q1119 @default.
- Q57387332 P921 Q175561 @default.