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- Q57387442 description "article published in 2005" @default.
- Q57387442 description "im September 2005 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57387442 description "wetenschappelijk artikel" @default.
- Q57387442 description "наукова стаття, опублікована у вересні 2005" @default.
- Q57387442 name "Effects of the oxygen precursor on the electrical and structural properties of HfO2 films grown by atomic layer deposition on Ge" @default.
- Q57387442 name "Effects of the oxygen precursor on the electrical and structural properties of HfO2 films grown by atomic layer deposition on Ge" @default.
- Q57387442 type Item @default.
- Q57387442 label "Effects of the oxygen precursor on the electrical and structural properties of HfO2 films grown by atomic layer deposition on Ge" @default.
- Q57387442 label "Effects of the oxygen precursor on the electrical and structural properties of HfO2 films grown by atomic layer deposition on Ge" @default.
- Q57387442 prefLabel "Effects of the oxygen precursor on the electrical and structural properties of HfO2 films grown by atomic layer deposition on Ge" @default.
- Q57387442 prefLabel "Effects of the oxygen precursor on the electrical and structural properties of HfO2 films grown by atomic layer deposition on Ge" @default.
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- Q57387442 P577 Q57387442-1648DE67-971A-41DB-97C3-F3802256076D @default.
- Q57387442 P356 1.2042631 @default.
- Q57387442 P1433 Q621615 @default.
- Q57387442 P1476 "Effects of the oxygen precursor on the electrical and structural properties of HfO2 films grown by atomic layer deposition on Ge" @default.
- Q57387442 P2093 "G. Scarel" @default.
- Q57387442 P2093 "G. Tallarida" @default.
- Q57387442 P2093 "M. Fanciulli" @default.
- Q57387442 P2093 "S. Ferrari" @default.
- Q57387442 P2093 "S. Spiga" @default.
- Q57387442 P2860 Q57387450 @default.
- Q57387442 P304 "112904" @default.
- Q57387442 P31 Q13442814 @default.
- Q57387442 P356 "10.1063/1.2042631" @default.
- Q57387442 P407 Q1860 @default.
- Q57387442 P433 "11" @default.
- Q57387442 P478 "87" @default.
- Q57387442 P50 Q53321206 @default.
- Q57387442 P50 Q57385737 @default.
- Q57387442 P577 "2005-09-12T00:00:00Z" @default.