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- Q57387458 description "wetenschappelijk artikel" @default.
- Q57387458 description "наукова стаття, опублікована в липні 2003" @default.
- Q57387458 name "Effects of growth temperature on the properties of atomic layer deposition grown ZrO2 films" @default.
- Q57387458 name "Effects of growth temperature on the properties of atomic layer deposition grown ZrO2 films" @default.
- Q57387458 type Item @default.
- Q57387458 label "Effects of growth temperature on the properties of atomic layer deposition grown ZrO2 films" @default.
- Q57387458 label "Effects of growth temperature on the properties of atomic layer deposition grown ZrO2 films" @default.
- Q57387458 prefLabel "Effects of growth temperature on the properties of atomic layer deposition grown ZrO2 films" @default.
- Q57387458 prefLabel "Effects of growth temperature on the properties of atomic layer deposition grown ZrO2 films" @default.
- Q57387458 P1433 Q57387458-040D14DF-B962-4486-9D10-E3A29EB71ABE @default.
- Q57387458 P1476 Q57387458-88FD3256-BD02-4277-9FC9-740CB1579A34 @default.
- Q57387458 P2093 Q57387458-0C087DE8-DE79-4375-A674-3FF14860A79E @default.
- Q57387458 P2093 Q57387458-50CBA447-2877-4AAA-964E-00C04FC398F1 @default.
- Q57387458 P2093 Q57387458-5F16A8BA-6F9B-4EBA-8C38-8CD113F666B0 @default.
- Q57387458 P2093 Q57387458-7803A78E-4C18-4746-A6ED-95B049ECBE3F @default.
- Q57387458 P2093 Q57387458-EE5D551E-9211-49E5-824C-97EF525ED229 @default.
- Q57387458 P304 Q57387458-84F11B11-0925-47DD-9178-BD77674BE268 @default.
- Q57387458 P31 Q57387458-1A398A48-F2BC-4E71-813A-A3B7774E417E @default.
- Q57387458 P356 Q57387458-804B99E3-0B71-4CC4-A944-4CC0B3763A94 @default.
- Q57387458 P433 Q57387458-B3764CE2-CD33-4E59-9FEB-C53A8E91AA48 @default.
- Q57387458 P478 Q57387458-62713955-12C3-417D-B738-C00D3455D7C4 @default.
- Q57387458 P50 Q57387458-F267417C-C4D7-4B23-A7B0-26A743D79EF3 @default.
- Q57387458 P577 Q57387458-12B8C92A-AD9C-48A7-B3DB-A58E0D6E96A6 @default.
- Q57387458 P356 1.1564032 @default.
- Q57387458 P1433 Q13739484 @default.
- Q57387458 P1476 "Effects of growth temperature on the properties of atomic layer deposition grown ZrO2 films" @default.
- Q57387458 P2093 "G. Scarel" @default.
- Q57387458 P2093 "G. Tallarida" @default.
- Q57387458 P2093 "M. Fanciulli" @default.
- Q57387458 P2093 "S. Ferrari" @default.
- Q57387458 P2093 "S. Spiga" @default.
- Q57387458 P304 "1359-1365" @default.
- Q57387458 P31 Q13442814 @default.
- Q57387458 P356 "10.1116/1.1564032" @default.
- Q57387458 P433 "4" @default.
- Q57387458 P478 "21" @default.
- Q57387458 P50 Q57385737 @default.
- Q57387458 P577 "2003-07-01T00:00:00Z" @default.