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- Q57389927 description "wetenschappelijk artikel" @default.
- Q57389927 description "наукова стаття, опублікована в травні 2014" @default.
- Q57389927 name "Influence of pulse power amplitude on plasma properties and film deposition in high power pulsed plasma enhanced chemical vapor deposition" @default.
- Q57389927 name "Influence of pulse power amplitude on plasma properties and film deposition in high power pulsed plasma enhanced chemical vapor deposition" @default.
- Q57389927 type Item @default.
- Q57389927 label "Influence of pulse power amplitude on plasma properties and film deposition in high power pulsed plasma enhanced chemical vapor deposition" @default.
- Q57389927 label "Influence of pulse power amplitude on plasma properties and film deposition in high power pulsed plasma enhanced chemical vapor deposition" @default.
- Q57389927 prefLabel "Influence of pulse power amplitude on plasma properties and film deposition in high power pulsed plasma enhanced chemical vapor deposition" @default.
- Q57389927 prefLabel "Influence of pulse power amplitude on plasma properties and film deposition in high power pulsed plasma enhanced chemical vapor deposition" @default.
- Q57389927 P1433 Q57389927-50C0C4F5-84AB-481B-B5C7-167863557F37 @default.
- Q57389927 P1476 Q57389927-86B5335D-1ADD-439E-A281-91981A34075B @default.
- Q57389927 P2093 Q57389927-02A4A2E7-8FE4-41BA-850C-A3533918F380 @default.
- Q57389927 P304 Q57389927-FE7092AE-C156-4639-BF37-1C1D1644A538 @default.
- Q57389927 P31 Q57389927-F38692A4-339F-4116-93DC-38B64895B8A8 @default.
- Q57389927 P356 Q57389927-77E7A07F-645F-44D2-BAED-16478E2E3632 @default.
- Q57389927 P433 Q57389927-67442B07-27B3-45DD-9673-F4F65C482A33 @default.
- Q57389927 P478 Q57389927-462B2427-74B4-4975-B444-F28A9E559D65 @default.
- Q57389927 P50 Q57389927-55D6B782-A798-489B-B0A1-EDF9889EC042 @default.
- Q57389927 P50 Q57389927-F04B8871-FABE-41BB-A1D9-C49947D98320 @default.
- Q57389927 P577 Q57389927-A117FCB0-3289-4571-9E94-FA2457B8388E @default.
- Q57389927 P356 1.4867442 @default.
- Q57389927 P1433 Q13739484 @default.
- Q57389927 P1476 "Influence of pulse power amplitude on plasma properties and film deposition in high power pulsed plasma enhanced chemical vapor deposition" @default.
- Q57389927 P2093 "Jens Jensen" @default.
- Q57389927 P304 "030602" @default.
- Q57389927 P31 Q13442814 @default.
- Q57389927 P356 "10.1116/1.4867442" @default.
- Q57389927 P433 "3" @default.
- Q57389927 P478 "32" @default.
- Q57389927 P50 Q57385736 @default.
- Q57389927 P50 Q57390333 @default.
- Q57389927 P577 "2014-05-01T00:00:00Z" @default.