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- Q57390402 description "im März 2012 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57390402 description "wetenschappelijk artikel" @default.
- Q57390402 description "наукова стаття, опублікована в березні 2012" @default.
- Q57390402 name "Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition" @default.
- Q57390402 name "Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition" @default.
- Q57390402 type Item @default.
- Q57390402 label "Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition" @default.
- Q57390402 label "Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition" @default.
- Q57390402 prefLabel "Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition" @default.
- Q57390402 prefLabel "Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition" @default.
- Q57390402 P1433 Q57390402-0B772CDB-B9BD-492F-817C-CF7627E5A971 @default.
- Q57390402 P1476 Q57390402-4CDC1F1F-F52C-48FB-A866-8FC24B5BD3EC @default.
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- Q57390402 P304 Q57390402-03616871-6E05-4729-99BE-8369027EDB59 @default.
- Q57390402 P31 Q57390402-13FDC531-3E41-4661-A56A-E50FC36C857E @default.
- Q57390402 P356 Q57390402-1FB544EF-3621-47E1-93AF-A678C9CFDDDA @default.
- Q57390402 P433 Q57390402-4FF494CE-9969-46F4-8CFD-54DB475EEEA6 @default.
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- Q57390402 P50 Q57390402-53D9B2C5-AD33-4369-BA7E-F55968F0E41C @default.
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- Q57390402 P577 Q57390402-663EF764-0406-48F3-B03C-994E8DB3FD6E @default.
- Q57390402 P356 1.3694798 @default.
- Q57390402 P1433 Q1987941 @default.
- Q57390402 P1476 "Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition" @default.
- Q57390402 P2093 "M. Bosund" @default.
- Q57390402 P2093 "P. Mattila" @default.
- Q57390402 P2860 Q57390436 @default.
- Q57390402 P2860 Q57390452 @default.
- Q57390402 P304 "063511" @default.
- Q57390402 P31 Q13442814 @default.
- Q57390402 P356 "10.1063/1.3694798" @default.
- Q57390402 P433 "6" @default.
- Q57390402 P478 "111" @default.
- Q57390402 P50 Q51153217 @default.
- Q57390402 P50 Q57390813 @default.
- Q57390402 P50 Q57392127 @default.
- Q57390402 P577 "2012-03-15T00:00:00Z" @default.