Matches in Wikidata for { <http://www.wikidata.org/entity/Q57397776> ?p ?o ?g. }
Showing items 1 to 48 of
48
with 100 items per page.
- Q57397776 description "article scientifique publié en 2017" @default.
- Q57397776 description "im Februar 2017 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57397776 description "wetenschappelijk artikel" @default.
- Q57397776 description "наукова стаття, опублікована в лютому 2017" @default.
- Q57397776 name "Theαandγplasma modes in plasma-enhanced atomic layer deposition with O2–N2capacitive discharges" @default.
- Q57397776 name "Theαandγplasma modes in plasma-enhanced atomic layer deposition with O2–N2capacitive discharges" @default.
- Q57397776 type Item @default.
- Q57397776 label "Theαandγplasma modes in plasma-enhanced atomic layer deposition with O2–N2capacitive discharges" @default.
- Q57397776 label "Theαandγplasma modes in plasma-enhanced atomic layer deposition with O2–N2capacitive discharges" @default.
- Q57397776 prefLabel "Theαandγplasma modes in plasma-enhanced atomic layer deposition with O2–N2capacitive discharges" @default.
- Q57397776 prefLabel "Theαandγplasma modes in plasma-enhanced atomic layer deposition with O2–N2capacitive discharges" @default.
- Q57397776 P1433 Q57397776-002E3AC3-9FDD-42A4-90E1-98AAFD70D95E @default.
- Q57397776 P1476 Q57397776-821D9268-59E6-4659-BCDD-7797F1E80AD1 @default.
- Q57397776 P2093 Q57397776-626D0725-5568-4E25-826D-A2F60208B18E @default.
- Q57397776 P2093 Q57397776-B50FF526-3129-4C61-A1D4-83D1B24B8989 @default.
- Q57397776 P2093 Q57397776-EF3822E0-2A42-487C-AB40-6675475D554E @default.
- Q57397776 P304 Q57397776-DFB0CCBB-87FE-4213-92A7-18A516FD9FCE @default.
- Q57397776 P31 Q57397776-40F88740-3B49-47FE-8A04-8C4A1DA7AD65 @default.
- Q57397776 P356 Q57397776-100C4BE4-D798-4CE5-925E-C0586F6AD6A1 @default.
- Q57397776 P433 Q57397776-1DF40CF9-F51D-4F3E-AAFA-AC52B75B1811 @default.
- Q57397776 P478 Q57397776-17A27EDF-2967-482F-9BBD-CD97270178DE @default.
- Q57397776 P50 Q57397776-19E4A678-043D-474A-B77A-8D43A07D3DBB @default.
- Q57397776 P50 Q57397776-6952A00B-4425-4DE1-B96A-7F96C9ED9401 @default.
- Q57397776 P50 Q57397776-70D3B619-9693-42F8-AE92-E6EBD25EB854 @default.
- Q57397776 P50 Q57397776-A95FBA9C-0086-4817-9EA7-79C4F66D3162 @default.
- Q57397776 P50 Q57397776-B6575C87-0576-46DB-BC28-49892ECD10C0 @default.
- Q57397776 P50 Q57397776-F607C15F-22F7-46FE-8A6F-7C1FF6867F3C @default.
- Q57397776 P577 Q57397776-238DBC81-DC7E-45C2-B96B-E375AB8727A2 @default.
- Q57397776 P921 Q57397776-FE8632DF-B9AA-47D7-9CB5-5605540F8D57 @default.
- Q57397776 P356 AA59B3 @default.
- Q57397776 P1433 Q2587435 @default.
- Q57397776 P1476 "Theαandγplasma modes in plasma-enhanced atomic layer deposition with O2–N2capacitive discharges" @default.
- Q57397776 P2093 "K Weibye" @default.
- Q57397776 P2093 "O Tarvainen" @default.
- Q57397776 P2093 "S Kinnunen" @default.
- Q57397776 P304 "095201" @default.
- Q57397776 P31 Q13442814 @default.
- Q57397776 P356 "10.1088/1361-6463/AA59B3" @default.
- Q57397776 P433 "9" @default.
- Q57397776 P478 "50" @default.
- Q57397776 P50 Q23040029 @default.
- Q57397776 P50 Q39793156 @default.
- Q57397776 P50 Q57390792 @default.
- Q57397776 P50 Q57398095 @default.
- Q57397776 P50 Q57398108 @default.
- Q57397776 P50 Q58583988 @default.
- Q57397776 P577 "2017-02-03T00:00:00Z" @default.
- Q57397776 P921 Q214781 @default.