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- Q57397904 description "article published in 2009" @default.
- Q57397904 description "article scientifique publié en 2009" @default.
- Q57397904 description "wetenschappelijk artikel" @default.
- Q57397904 description "наукова стаття, опублікована у 2009" @default.
- Q57397904 name "Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge" @default.
- Q57397904 name "Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge" @default.
- Q57397904 type Item @default.
- Q57397904 label "Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge" @default.
- Q57397904 label "Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge" @default.
- Q57397904 prefLabel "Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge" @default.
- Q57397904 prefLabel "Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge" @default.
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- Q57397904 P31 Q57397904-CC77584A-0548-40E6-9E15-126E8FD1B51F @default.
- Q57397904 P356 Q57397904-4708BDCE-D19B-411F-B922-3CC828141713 @default.
- Q57397904 P433 Q57397904-B2738B0B-5272-46E4-A67A-3B1C3AAEC7A2 @default.
- Q57397904 P478 Q57397904-D04AA009-8D5B-4799-83DB-223B3CFB1FAF @default.
- Q57397904 P50 Q57397904-54421EB8-B61F-4F7F-8461-9F931C8EA3DB @default.
- Q57397904 P50 Q57397904-8284F5C9-7E58-4B65-9056-00309AD63125 @default.
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- Q57397904 P921 Q57397904-B93619A3-F54D-49DF-9956-54D1C67F8EE7 @default.
- Q57397904 P356 1.3117257 @default.
- Q57397904 P1433 Q13739491 @default.
- Q57397904 P1476 "Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge" @default.
- Q57397904 P2093 "Harry J. Whitlow" @default.
- Q57397904 P304 "1101" @default.
- Q57397904 P31 Q13442814 @default.
- Q57397904 P356 "10.1116/1.3117257" @default.
- Q57397904 P433 "3" @default.
- Q57397904 P478 "27" @default.
- Q57397904 P50 Q23040029 @default.
- Q57397904 P50 Q58808889 @default.
- Q57397904 P577 "2009-01-01T00:00:00Z" @default.
- Q57397904 P921 Q214781 @default.