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- Q57436042 description "im Mai 2011 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57436042 description "wetenschappelijk artikel" @default.
- Q57436042 description "наукова стаття, опублікована в травні 2011" @default.
- Q57436042 name "Roughness Analysis of the Critical Dimension by Using Spectroscopic Ellipsometry" @default.
- Q57436042 name "Roughness Analysis of the Critical Dimension by Using Spectroscopic Ellipsometry" @default.
- Q57436042 type Item @default.
- Q57436042 label "Roughness Analysis of the Critical Dimension by Using Spectroscopic Ellipsometry" @default.
- Q57436042 label "Roughness Analysis of the Critical Dimension by Using Spectroscopic Ellipsometry" @default.
- Q57436042 prefLabel "Roughness Analysis of the Critical Dimension by Using Spectroscopic Ellipsometry" @default.
- Q57436042 prefLabel "Roughness Analysis of the Critical Dimension by Using Spectroscopic Ellipsometry" @default.
- Q57436042 P1433 Q57436042-DD417B6E-3826-401F-B367-00B2D193B40E @default.
- Q57436042 P1476 Q57436042-4C2D17AF-3012-4706-A528-9131CD5DDB69 @default.
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- Q57436042 P2093 Q57436042-C7BCD42B-D001-4289-9746-4248CA64D58C @default.
- Q57436042 P304 Q57436042-D31BDF17-1503-47AD-9D17-76064336907F @default.
- Q57436042 P31 Q57436042-7B8CCB9F-1701-4CEB-A5FE-8A059ABACBEB @default.
- Q57436042 P356 Q57436042-E4DC9D04-2A91-4C09-AD54-FFCF44FBC8A5 @default.
- Q57436042 P433 Q57436042-B1630434-2053-4EFC-B087-5E8E916794EC @default.
- Q57436042 P478 Q57436042-DC54B47E-646D-41F0-B392-F1F602ADCFC2 @default.
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- Q57436042 P577 Q57436042-0D837BE9-BD5B-4938-B9AD-92F925FADD46 @default.
- Q57436042 P356 JKPS.58.1426 @default.
- Q57436042 P1433 Q6296163 @default.
- Q57436042 P1476 "Roughness Analysis of the Critical Dimension by Using Spectroscopic Ellipsometry" @default.
- Q57436042 P2093 "J. S. Byun" @default.
- Q57436042 P2093 "J.-M. Chung" @default.
- Q57436042 P2093 "S.-H. Han" @default.
- Q57436042 P2093 "T. H. Ghong" @default.
- Q57436042 P2093 "Y. D. Kim" @default.
- Q57436042 P304 "1426-1428" @default.
- Q57436042 P31 Q13442814 @default.
- Q57436042 P356 "10.3938/JKPS.58.1426" @default.
- Q57436042 P433 "5(1)" @default.
- Q57436042 P478 "58" @default.
- Q57436042 P50 Q43392 @default.
- Q57436042 P577 "2011-05-13T00:00:00Z" @default.