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- Q57451714 description "wetenschappelijk artikel" @default.
- Q57451714 description "наукова стаття, опублікована в березні 2017" @default.
- Q57451714 name "Forming a more robust sidewall spacer with lower k (dielectric constant) value" @default.
- Q57451714 name "Forming a more robust sidewall spacer with lower k" @default.
- Q57451714 type Item @default.
- Q57451714 label "Forming a more robust sidewall spacer with lower k (dielectric constant) value" @default.
- Q57451714 label "Forming a more robust sidewall spacer with lower k" @default.
- Q57451714 prefLabel "Forming a more robust sidewall spacer with lower k (dielectric constant) value" @default.
- Q57451714 prefLabel "Forming a more robust sidewall spacer with lower k" @default.
- Q57451714 P1476 Q57451714-257BA84A-9B73-4BE0-B017-910364708E9E @default.
- Q57451714 P2093 Q57451714-18CA5A42-95A8-4C0A-9ED5-DFB074994759 @default.
- Q57451714 P2093 Q57451714-4824F3DA-3C4F-4505-B9F0-DBCD924477C2 @default.
- Q57451714 P2093 Q57451714-6BB48A1B-8296-4349-81EA-DD8B9E822635 @default.
- Q57451714 P2093 Q57451714-ED9A366F-FA39-49D1-B3E1-DFFBD3B0C656 @default.
- Q57451714 P2093 Q57451714-F005A933-15AB-40BB-BF8E-922C0A0EAE5D @default.
- Q57451714 P31 Q57451714-3028557D-19CF-43B0-8D7B-23CBBDDABBA5 @default.
- Q57451714 P356 Q57451714-E4663558-B788-4ACB-B1BC-D92DAA1416E2 @default.
- Q57451714 P50 Q57451714-EBA35D57-BEDE-4C5A-A9AA-A5864F10EF59 @default.
- Q57451714 P577 Q57451714-28A3CECB-D37D-4A05-A4C4-F55C1669F418 @default.
- Q57451714 P356 CSTIC.2017.7919797 @default.
- Q57451714 P1476 "Forming a more robust sidewall spacer with lower k (dielectric constant) value" @default.
- Q57451714 P2093 "Huang Liu" @default.
- Q57451714 P2093 "Jinping Liu" @default.
- Q57451714 P2093 "Stephan Grunow" @default.
- Q57451714 P2093 "Sujatha Sankaran" @default.
- Q57451714 P2093 "Tao Han" @default.
- Q57451714 P31 Q13442814 @default.
- Q57451714 P356 "10.1109/CSTIC.2017.7919797" @default.
- Q57451714 P50 Q57435781 @default.
- Q57451714 P577 "2017-03-01T00:00:00Z" @default.