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- Q57452003 description "article scientifique publié en 2006" @default.
- Q57452003 description "wetenschappelijk artikel" @default.
- Q57452003 description "наукова стаття, опублікована в липні 2006" @default.
- Q57452003 name "Laser assisted and wet chemical etching of silicon nanostructures" @default.
- Q57452003 name "Laser assisted and wet chemical etching of silicon nanostructures" @default.
- Q57452003 type Item @default.
- Q57452003 label "Laser assisted and wet chemical etching of silicon nanostructures" @default.
- Q57452003 label "Laser assisted and wet chemical etching of silicon nanostructures" @default.
- Q57452003 prefLabel "Laser assisted and wet chemical etching of silicon nanostructures" @default.
- Q57452003 prefLabel "Laser assisted and wet chemical etching of silicon nanostructures" @default.
- Q57452003 P1433 Q57452003-2199AC4E-1A7E-4EA7-83A2-659545D24625 @default.
- Q57452003 P1476 Q57452003-20788CC4-F893-4096-B422-BD105FE58556 @default.
- Q57452003 P2093 Q57452003-E4C5615C-B1F7-481A-8026-97C6726D882D @default.
- Q57452003 P304 Q57452003-4C4F59EF-3357-4F1C-A384-D1D600FBED69 @default.
- Q57452003 P31 Q57452003-84A5C2FF-91E6-4ED9-9F51-7F7B7D5DC92C @default.
- Q57452003 P356 Q57452003-B838242D-92C1-48DE-BD61-AEC9B202CC8F @default.
- Q57452003 P433 Q57452003-1B609A79-EB98-4517-83FC-C94A5D07F7EC @default.
- Q57452003 P478 Q57452003-58C1D5B2-1BAE-4951-AAFB-4782F1AE8BA6 @default.
- Q57452003 P50 Q57452003-5DEAC129-0FF9-43D5-82BD-EEAC0AFCD234 @default.
- Q57452003 P50 Q57452003-9D32995F-4A94-4133-B239-BD606D2C5387 @default.
- Q57452003 P577 Q57452003-C4C72E86-EC7F-4B18-A295-32075C66A8C2 @default.
- Q57452003 P921 Q57452003-E13DFBE2-1D87-4E5C-BBA7-80088C39E8F4 @default.
- Q57452003 P356 1.2188414 @default.
- Q57452003 P1433 Q13739484 @default.
- Q57452003 P1476 "Laser assisted and wet chemical etching of silicon nanostructures" @default.
- Q57452003 P2093 "Mona Nahidi" @default.
- Q57452003 P304 "1474-1479" @default.
- Q57452003 P31 Q13442814 @default.
- Q57452003 P356 "10.1116/1.2188414" @default.
- Q57452003 P433 "4" @default.
- Q57452003 P478 "24" @default.
- Q57452003 P50 Q56550085 @default.
- Q57452003 P50 Q57685305 @default.
- Q57452003 P577 "2006-07-01T00:00:00Z" @default.
- Q57452003 P921 Q1093894 @default.