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- Q57546616 description "article scientifique publié en 2001" @default.
- Q57546616 description "im Oktober 2001 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57546616 description "wetenschappelijk artikel" @default.
- Q57546616 description "наукова стаття, опублікована в жовтні 2001" @default.
- Q57546616 name "Improved diffusion barrier by stuffing the grain boundaries of TiN with a thin Al interlayer for Cu metallization" @default.
- Q57546616 name "Improved diffusion barrier by stuffing the grain boundaries of TiN with a thin Al interlayer for Cu metallization" @default.
- Q57546616 type Item @default.
- Q57546616 label "Improved diffusion barrier by stuffing the grain boundaries of TiN with a thin Al interlayer for Cu metallization" @default.
- Q57546616 label "Improved diffusion barrier by stuffing the grain boundaries of TiN with a thin Al interlayer for Cu metallization" @default.
- Q57546616 prefLabel "Improved diffusion barrier by stuffing the grain boundaries of TiN with a thin Al interlayer for Cu metallization" @default.
- Q57546616 prefLabel "Improved diffusion barrier by stuffing the grain boundaries of TiN with a thin Al interlayer for Cu metallization" @default.
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- Q57546616 P1476 Q57546616-FF9FD3B8-C9BA-4877-88FA-FC42210A764A @default.
- Q57546616 P2093 Q57546616-686B9091-36C7-4D9E-AC8D-23CF4EB1F67A @default.
- Q57546616 P2093 Q57546616-9F7BF5DE-14C3-4029-8638-8FBCED9554DF @default.
- Q57546616 P2860 Q57546616-55ADEDB8-79FE-4B75-A2B9-CA7B07618E74 @default.
- Q57546616 P2860 Q57546616-F4DA1B89-5198-44FA-97D2-9EBB8105A6D4 @default.
- Q57546616 P304 Q57546616-1ACCE540-3295-458D-8C25-1B6B9155FBA8 @default.
- Q57546616 P31 Q57546616-E02E0DCC-622C-4F3C-96F9-D06600D173F0 @default.
- Q57546616 P356 Q57546616-FB9715F2-6550-405F-BC60-5F26FE6E1753 @default.
- Q57546616 P407 Q57546616-BA0AABFE-2C6E-413E-9957-8C2DAB34D0D1 @default.
- Q57546616 P433 Q57546616-4659D6FE-FC8F-4BE2-8445-9B046E6C1AC4 @default.
- Q57546616 P478 Q57546616-AB1352BE-7C26-409E-B9AF-638B4E0D5189 @default.
- Q57546616 P50 Q57546616-11F5A74A-F5E9-4775-8AFC-0F0A32BB3673 @default.
- Q57546616 P50 Q57546616-C78142FE-4FE7-4E43-BCD5-8D59A02C9D62 @default.
- Q57546616 P577 Q57546616-153E8661-83AE-407E-B5FC-A22514715496 @default.
- Q57546616 P356 1.1409594 @default.
- Q57546616 P1433 Q621615 @default.
- Q57546616 P1476 "Improved diffusion barrier by stuffing the grain boundaries of TiN with a thin Al interlayer for Cu metallization" @default.
- Q57546616 P2093 "Arindom Datta" @default.
- Q57546616 P2093 "Ki-Bum Kim" @default.
- Q57546616 P2860 Q56066910 @default.
- Q57546616 P2860 Q58814061 @default.
- Q57546616 P304 "2549-2551" @default.
- Q57546616 P31 Q13442814 @default.
- Q57546616 P356 "10.1063/1.1409594" @default.
- Q57546616 P407 Q1860 @default.
- Q57546616 P433 "16" @default.
- Q57546616 P478 "79" @default.
- Q57546616 P50 Q51538946 @default.
- Q57546616 P50 Q62852650 @default.
- Q57546616 P577 "2001-10-15T00:00:00Z" @default.