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- Q57567413 description "article scientifique publié en 2006" @default.
- Q57567413 description "wetenschappelijk artikel" @default.
- Q57567413 description "наукова стаття, опублікована у 2006" @default.
- Q57567413 name "Analysis of acid yield generated in chemically amplified electron beam resist" @default.
- Q57567413 name "Analysis of acid yield generated in chemically amplified electron beam resist" @default.
- Q57567413 type Item @default.
- Q57567413 label "Analysis of acid yield generated in chemically amplified electron beam resist" @default.
- Q57567413 label "Analysis of acid yield generated in chemically amplified electron beam resist" @default.
- Q57567413 prefLabel "Analysis of acid yield generated in chemically amplified electron beam resist" @default.
- Q57567413 prefLabel "Analysis of acid yield generated in chemically amplified electron beam resist" @default.
- Q57567413 P1433 Q57567413-AE4B0CB4-FF17-48AF-9086-22F527E4F760 @default.
- Q57567413 P1476 Q57567413-D345D21E-1D7C-46C8-8D3F-4334F4C6182B @default.
- Q57567413 P2093 Q57567413-15B5A777-491F-414A-9366-CEB8D94AED48 @default.
- Q57567413 P2093 Q57567413-381C2444-AFC6-41D4-B4C9-AB520403BBC2 @default.
- Q57567413 P2093 Q57567413-578588F8-CAA1-4D5B-8F06-4A463F73DEDF @default.
- Q57567413 P2093 Q57567413-7719D5B9-FE86-47A1-8C71-845755A5E0A2 @default.
- Q57567413 P2093 Q57567413-804E3A0F-D9DD-4BCC-9678-0A28C273564D @default.
- Q57567413 P2093 Q57567413-94317085-5790-4C0F-94BB-A9C205D90DC6 @default.
- Q57567413 P2093 Q57567413-ACB20DC3-3013-452A-820D-BF0D507933AF @default.
- Q57567413 P304 Q57567413-B77874B2-BC57-4A9C-A872-E3A20E6C3E06 @default.
- Q57567413 P31 Q57567413-B5DA1A61-945B-4CB8-896F-3987A9725674 @default.
- Q57567413 P356 Q57567413-E60EEB78-A7C3-42DE-A5D8-44468F2A3464 @default.
- Q57567413 P433 Q57567413-57E3DD8C-D104-44E8-AB3B-061A0CAD1FE7 @default.
- Q57567413 P478 Q57567413-917816B1-7168-449A-8A69-955700566ACB @default.
- Q57567413 P577 Q57567413-7EB13C8F-4E67-4C59-8722-1A493B41A446 @default.
- Q57567413 P356 1.2366656 @default.
- Q57567413 P1433 Q13739491 @default.
- Q57567413 P1476 "Analysis of acid yield generated in chemically amplified electron beam resist" @default.
- Q57567413 P2093 "Akinori Saeki" @default.
- Q57567413 P2093 "Kazumasa Okamoto" @default.
- Q57567413 P2093 "Seiichi Tagawa" @default.
- Q57567413 P2093 "Takahiro Kozawa" @default.
- Q57567413 P2093 "Takumi Shigaki" @default.
- Q57567413 P2093 "Toshiyuki Kai" @default.
- Q57567413 P2093 "Tsutomu Shimokawa" @default.
- Q57567413 P304 "3055" @default.
- Q57567413 P31 Q13442814 @default.
- Q57567413 P356 "10.1116/1.2366656" @default.
- Q57567413 P433 "6" @default.
- Q57567413 P478 "24" @default.
- Q57567413 P577 "2006-01-01T00:00:00Z" @default.