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- Q57567470 description "article scientifique publié en juin 2002" @default.
- Q57567470 description "im Juni 2002 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57567470 description "наукова стаття, опублікована в червні 2002" @default.
- Q57567470 name "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process (I) –Development of Subpicosecond Pulse Radiolysis and Relation between Space Resolution and Radiation-Induced Rea" @default.
- Q57567470 type Item @default.
- Q57567470 label "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process (I) –Development of Subpicosecond Pulse Radiolysis and Relation between Space Resolution and Radiation-Induced Rea" @default.
- Q57567470 prefLabel "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process (I) –Development of Subpicosecond Pulse Radiolysis and Relation between Space Resolution and Radiation-Induced Rea" @default.
- Q57567470 P1433 Q57567470-8083D53B-AF29-4C76-8F56-4E6F8F65E399 @default.
- Q57567470 P1476 Q57567470-D92FFFF2-E528-48D7-95D5-7946C9D4A7BD @default.
- Q57567470 P2093 Q57567470-84D3CCE7-0849-43F7-8232-5F53C91B8EFA @default.
- Q57567470 P2093 Q57567470-977F7535-19D6-43C5-B7F5-14D0F3E4236B @default.
- Q57567470 P2093 Q57567470-9DB24A83-1A59-4E48-8E77-F3D982D4D376 @default.
- Q57567470 P2093 Q57567470-D9904F5F-E445-40A0-BB54-C0C9A80BCBE7 @default.
- Q57567470 P304 Q57567470-B8E992E9-84B0-4DA7-8BC3-173C54D81394 @default.
- Q57567470 P31 Q57567470-FB3FE68B-83E4-42F2-95B8-B73AEA875354 @default.
- Q57567470 P356 Q57567470-2F93FCFE-EAF4-4AD8-BF94-86E3BB885E8E @default.
- Q57567470 P433 Q57567470-718A8299-A3F0-428A-8E6D-8B76108C2CB5 @default.
- Q57567470 P478 Q57567470-7FC65C61-EB64-4965-9F09-7B1A19E0C22A @default.
- Q57567470 P577 Q57567470-F0D286ED-105E-46EB-B9C5-240EAAF770D1 @default.
- Q57567470 P356 JJAP.41.4208 @default.
- Q57567470 P1433 Q2366671 @default.
- Q57567470 P1476 "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process (I) –Development of Subpicosecond Pulse Radiolysis and Relation between Space Resolution and Radiation-Induced Rea" @default.
- Q57567470 P2093 "Akinori Saeki" @default.
- Q57567470 P2093 "Seiichi Tagawa" @default.
- Q57567470 P2093 "Takahiro Kozawa" @default.
- Q57567470 P2093 "Yoichi Yoshida" @default.
- Q57567470 P304 "4208-4212" @default.
- Q57567470 P31 Q13442814 @default.
- Q57567470 P356 "10.1143/JJAP.41.4208" @default.
- Q57567470 P433 "Part 1, No. 6B" @default.
- Q57567470 P478 "41" @default.
- Q57567470 P577 "2002-06-30T00:00:00Z" @default.