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- Q57567471 description "article scientifique publié en juin 2002" @default.
- Q57567471 description "im Juni 2002 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57567471 description "wetenschappelijk artikel" @default.
- Q57567471 description "наукова стаття, опублікована в червні 2002" @default.
- Q57567471 name "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process (II) –Relation between Resist Space Resolution and Space Distribution of Ionic Species–" @default.
- Q57567471 name "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process" @default.
- Q57567471 type Item @default.
- Q57567471 label "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process (II) –Relation between Resist Space Resolution and Space Distribution of Ionic Species–" @default.
- Q57567471 label "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process" @default.
- Q57567471 prefLabel "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process (II) –Relation between Resist Space Resolution and Space Distribution of Ionic Species–" @default.
- Q57567471 prefLabel "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process" @default.
- Q57567471 P1433 Q57567471-F8545590-FE3E-45D1-B7AC-B0AF3122A83C @default.
- Q57567471 P1476 Q57567471-983B5D45-8BF7-4429-8481-B1C4EBE09F29 @default.
- Q57567471 P2093 Q57567471-45F61372-4DC4-4DB3-83FE-C8E570523534 @default.
- Q57567471 P2093 Q57567471-5AB65475-473A-4511-83E7-6A02888F0B7B @default.
- Q57567471 P2093 Q57567471-8BA313C5-B247-45A6-A986-B68B7CBAF13D @default.
- Q57567471 P2093 Q57567471-C8DBA864-DA6E-45ED-806A-54B71DCA9236 @default.
- Q57567471 P304 Q57567471-5CAE020A-8828-46CA-A8C6-2686C1F916CF @default.
- Q57567471 P31 Q57567471-D9A97DDC-5DA1-47EC-AE11-C56DE285E46A @default.
- Q57567471 P356 Q57567471-B22B6AC8-51C4-41F8-B75A-B28B05033163 @default.
- Q57567471 P433 Q57567471-1DC32CE0-CDE7-4C46-88DB-1C0F0CF2643F @default.
- Q57567471 P478 Q57567471-53476C29-80FB-4838-AD1F-877E114EC20D @default.
- Q57567471 P577 Q57567471-2D348A08-B2E3-40FA-9A6D-7CC4C1FCABAA @default.
- Q57567471 P356 JJAP.41.4213 @default.
- Q57567471 P1433 Q2366671 @default.
- Q57567471 P1476 "Study on Radiation-Induced Reaction in Microscopic Region for Basic Understanding of Electron Beam Patterning in Lithographic Process (II) –Relation between Resist Space Resolution and Space Distribution of Ionic Species–" @default.
- Q57567471 P2093 "Akinori Saeki" @default.
- Q57567471 P2093 "Seiichi Tagawa" @default.
- Q57567471 P2093 "Takahiro Kozawa" @default.
- Q57567471 P2093 "Yoichi Yoshida" @default.
- Q57567471 P304 "4213-4216" @default.
- Q57567471 P31 Q13442814 @default.
- Q57567471 P356 "10.1143/JJAP.41.4213" @default.
- Q57567471 P433 "Part 1, No. 6B" @default.
- Q57567471 P478 "41" @default.
- Q57567471 P577 "2002-06-30T00:00:00Z" @default.