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- Q57617257 description "article" @default.
- Q57617257 description "im März 1999 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57617257 description "wetenschappelijk artikel" @default.
- Q57617257 description "наукова стаття, опублікована в березні 1999" @default.
- Q57617257 name "Composition, oxidation, and optical properties of fluorinated silicon nitride film by inductively coupled plasma enhanced chemical vapor deposition" @default.
- Q57617257 name "Composition, oxidation, and optical properties of fluorinated silicon nitride film by inductively coupled plasma enhanced chemical vapor deposition" @default.
- Q57617257 type Item @default.
- Q57617257 label "Composition, oxidation, and optical properties of fluorinated silicon nitride film by inductively coupled plasma enhanced chemical vapor deposition" @default.
- Q57617257 label "Composition, oxidation, and optical properties of fluorinated silicon nitride film by inductively coupled plasma enhanced chemical vapor deposition" @default.
- Q57617257 prefLabel "Composition, oxidation, and optical properties of fluorinated silicon nitride film by inductively coupled plasma enhanced chemical vapor deposition" @default.
- Q57617257 prefLabel "Composition, oxidation, and optical properties of fluorinated silicon nitride film by inductively coupled plasma enhanced chemical vapor deposition" @default.
- Q57617257 P1433 Q57617257-AF6AAB78-9FEE-4FCD-9C50-8B3166AE9086 @default.
- Q57617257 P1476 Q57617257-7A462A1D-FA85-41DF-8E4A-DF09B4B7CF11 @default.
- Q57617257 P2093 Q57617257-04B7105E-9402-4BDA-8C54-CC903823D73A @default.
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- Q57617257 P2093 Q57617257-DB3FB6DB-932F-4BCA-8694-B492BDD01A9F @default.
- Q57617257 P2093 Q57617257-F1015667-483E-4082-BC63-C98FAB6E2B76 @default.
- Q57617257 P2860 Q57617257-F5EFC181-D946-47E3-B437-D1FD6855415E @default.
- Q57617257 P304 Q57617257-41D9607C-6B9F-48E8-8A20-EFEF1A46709A @default.
- Q57617257 P31 Q57617257-4A562699-80AB-48FF-82E6-A16753EDC712 @default.
- Q57617257 P356 Q57617257-4C81CD9A-7E06-4454-B549-CB0CD50E8B32 @default.
- Q57617257 P433 Q57617257-DD0F639F-2F10-4413-A0B5-44D059B45D8B @default.
- Q57617257 P478 Q57617257-5D2A892C-158B-4D2A-B0AA-F8D8A47D157E @default.
- Q57617257 P577 Q57617257-072E8243-A96D-4C35-B846-F6BF5E09439B @default.
- Q57617257 P356 JMR.1999.0133 @default.
- Q57617257 P1433 Q15760559 @default.
- Q57617257 P1476 "Composition, oxidation, and optical properties of fluorinated silicon nitride film by inductively coupled plasma enhanced chemical vapor deposition" @default.
- Q57617257 P2093 "Byeong-Soo Bae" @default.
- Q57617257 P2093 "Byung-Hyuk Jun" @default.
- Q57617257 P2093 "Dae-Weon Kim" @default.
- Q57617257 P2093 "Joon Sung Lee" @default.
- Q57617257 P2093 "Kwangsoo No" @default.
- Q57617257 P2093 "Tae-Hyun Sung" @default.
- Q57617257 P2860 Q57075532 @default.
- Q57617257 P304 "995-1001" @default.
- Q57617257 P31 Q13442814 @default.
- Q57617257 P356 "10.1557/JMR.1999.0133" @default.
- Q57617257 P433 "03" @default.
- Q57617257 P478 "14" @default.
- Q57617257 P577 "1999-03-01T00:00:00Z" @default.