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- Q57617286 description "im März 1997 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57617286 description "wetenschappelijk artikel" @default.
- Q57617286 description "наукова стаття, опублікована в березні 1997" @default.
- Q57617286 name "Effects of gas ring position and mesh introduction on film quality and thickness uniformity" @default.
- Q57617286 name "Effects of gas ring position and mesh introduction on film quality and thickness uniformity" @default.
- Q57617286 type Item @default.
- Q57617286 label "Effects of gas ring position and mesh introduction on film quality and thickness uniformity" @default.
- Q57617286 label "Effects of gas ring position and mesh introduction on film quality and thickness uniformity" @default.
- Q57617286 prefLabel "Effects of gas ring position and mesh introduction on film quality and thickness uniformity" @default.
- Q57617286 prefLabel "Effects of gas ring position and mesh introduction on film quality and thickness uniformity" @default.
- Q57617286 P1433 Q57617286-23479868-6B6F-49CE-B0C7-2292369889D2 @default.
- Q57617286 P1476 Q57617286-5F66E4A7-A083-4E9D-963E-254A0EB2B496 @default.
- Q57617286 P2093 Q57617286-3489337E-9E7B-4502-8FBB-F65F8B508E14 @default.
- Q57617286 P2093 Q57617286-51ED69B3-ABA6-413B-B7B3-CB8BC41756A6 @default.
- Q57617286 P2093 Q57617286-538E4208-52A9-42FC-8F64-8816F1B29060 @default.
- Q57617286 P2093 Q57617286-88834B77-8F62-4A6C-999E-C70B94E3C454 @default.
- Q57617286 P2093 Q57617286-8C36153C-98F2-4654-9BD1-BC3CD0E34BCD @default.
- Q57617286 P2093 Q57617286-91F7D5E3-AB28-472A-8418-B6C2365D8021 @default.
- Q57617286 P2093 Q57617286-B6C04330-E2DF-4E0F-A3C4-02CA8787F0C4 @default.
- Q57617286 P2093 Q57617286-BF0E4AB9-5B86-461F-88C2-699C65E97BE1 @default.
- Q57617286 P2860 Q57617286-12F3FD46-98CD-4FB4-9255-CC4A473A946B @default.
- Q57617286 P2860 Q57617286-F2DD86BF-E5C8-4677-98DB-7103CA20E67A @default.
- Q57617286 P304 Q57617286-3ADE4DE6-F2DF-4EFE-A65D-DC10E7DB2010 @default.
- Q57617286 P31 Q57617286-0D7D1F07-7858-45D0-A604-ED4F59785493 @default.
- Q57617286 P356 Q57617286-2C57F9B4-6905-45BD-B3E1-185620239ED2 @default.
- Q57617286 P433 Q57617286-C3ED3D99-916C-4BCC-A25D-D62ECA1162E1 @default.
- Q57617286 P478 Q57617286-9BE2E639-08D3-4972-8B59-039729E6F490 @default.
- Q57617286 P577 Q57617286-B9EA9204-0A63-41E9-B681-7758A7591FF2 @default.
- Q57617286 P356 S0921-5107(96)01913-7 @default.
- Q57617286 P1433 Q15750647 @default.
- Q57617286 P1476 "Effects of gas ring position and mesh introduction on film quality and thickness uniformity" @default.
- Q57617286 P2093 "Byeong-Soo Bae" @default.
- Q57617286 P2093 "Eunah Kim" @default.
- Q57617286 P2093 "Kwangsoo No" @default.
- Q57617286 P2093 "Sang-Gyun Woo" @default.
- Q57617286 P2093 "Seungbum Hong" @default.
- Q57617286 P2093 "Sung-Chul Lim" @default.
- Q57617286 P2093 "Young-Bum Koh" @default.
- Q57617286 P2093 "Zhong-Tao Jiang" @default.
- Q57617286 P2860 Q29036099 @default.
- Q57617286 P2860 Q57617293 @default.
- Q57617286 P304 "98-101" @default.
- Q57617286 P31 Q13442814 @default.
- Q57617286 P356 "10.1016/S0921-5107(96)01913-7" @default.
- Q57617286 P433 "1-3" @default.
- Q57617286 P478 "45" @default.
- Q57617286 P577 "1997-03-01T00:00:00Z" @default.