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- Q57617295 description "article by Zhong-Tao Jiang et al published 1 October 1996 in Semiconductor Science and Technology" @default.
- Q57617295 description "im Oktober 1996 veröffentlichter wissenschaftlicher Artikel" @default.
- Q57617295 description "wetenschappelijk artikel" @default.
- Q57617295 description "наукова стаття, опублікована в жовтні 1996" @default.
- Q57617295 name "Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography" @default.
- Q57617295 name "Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography" @default.
- Q57617295 type Item @default.
- Q57617295 label "Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography" @default.
- Q57617295 label "Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography" @default.
- Q57617295 prefLabel "Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography" @default.
- Q57617295 prefLabel "Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography" @default.
- Q57617295 P1433 Q57617295-B8906DA5-4643-4173-949C-09F6A2F8038F @default.
- Q57617295 P1476 Q57617295-E7F20152-B033-4A5C-89EE-66F61996CDBA @default.
- Q57617295 P2093 Q57617295-0A9ACB3E-B257-4657-BA99-C1D860E57D13 @default.
- Q57617295 P2093 Q57617295-11192843-C989-45F0-910B-DF603EC10E9C @default.
- Q57617295 P2093 Q57617295-17A5FBCB-F1DF-496D-BC7C-76970F84A860 @default.
- Q57617295 P2093 Q57617295-298CE894-3802-40BE-BF7E-713352977725 @default.
- Q57617295 P2093 Q57617295-746B63F2-DF2A-47B5-8815-4E40AABBF16A @default.
- Q57617295 P2093 Q57617295-87FB9AC6-189A-49FB-94E1-5AFC7ED067A9 @default.
- Q57617295 P2093 Q57617295-8CA914E1-845D-4D21-BBC4-6FF44A7B95E7 @default.
- Q57617295 P2093 Q57617295-B2570E4B-7271-4725-B425-A83F2557E779 @default.
- Q57617295 P2093 Q57617295-BE6912BB-02DF-4876-B9F0-2FB4CFDD4B6D @default.
- Q57617295 P304 Q57617295-35BCC5B4-7172-401F-A924-3113ECAEEF2C @default.
- Q57617295 P31 Q57617295-6CDF56C5-211F-443C-BACB-B68F706DFF5C @default.
- Q57617295 P356 Q57617295-9899F594-2C0C-49F6-94FA-01DD55B6A7F8 @default.
- Q57617295 P433 Q57617295-B9396BAA-B3F8-4BCB-9089-882721962C9D @default.
- Q57617295 P478 Q57617295-BBBDC92E-87DF-4C17-9210-0A0575534582 @default.
- Q57617295 P577 Q57617295-5FB47298-21FE-45F8-B9C7-A8E3C95B49DF @default.
- Q57617295 P356 016 @default.
- Q57617295 P1433 Q15708713 @default.
- Q57617295 P1476 "Optical property simulation of single-layer halftone phaseshifting masks for DUV microlithography" @default.
- Q57617295 P2093 "Byeong-Soo Bae" @default.
- Q57617295 P2093 "Chang Kwon Hwangbo" @default.
- Q57617295 P2093 "Eunah Kim" @default.
- Q57617295 P2093 "Kwangsoo No" @default.
- Q57617295 P2093 "Sang-Gyun Woo" @default.
- Q57617295 P2093 "Seungbum Hong" @default.
- Q57617295 P2093 "Sung-Chul Lim" @default.
- Q57617295 P2093 "Young-Bum Koh" @default.
- Q57617295 P2093 "Zhong-Tao Jiang" @default.
- Q57617295 P304 "1450-1455" @default.
- Q57617295 P31 Q13442814 @default.
- Q57617295 P356 "10.1088/0268-1242/11/10/016" @default.
- Q57617295 P433 "10" @default.
- Q57617295 P478 "11" @default.
- Q57617295 P577 "1996-10-01T00:00:00Z" @default.