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- Q57641115 description "wetenschappelijk artikel" @default.
- Q57641115 description "наукова стаття, опублікована в травні 2017" @default.
- Q57641115 name "Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications" @default.
- Q57641115 name "Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications" @default.
- Q57641115 type Item @default.
- Q57641115 label "Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications" @default.
- Q57641115 label "Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications" @default.
- Q57641115 prefLabel "Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications" @default.
- Q57641115 prefLabel "Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications" @default.
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- Q57641115 P304 Q57641115-3DB32BDF-0D73-402D-81D5-D6BEF2608F9C @default.
- Q57641115 P31 Q57641115-E4F9874C-E069-4752-B645-9C80C1EC180E @default.
- Q57641115 P356 Q57641115-23470C88-DFC2-4312-BE56-074CD9A72DC0 @default.
- Q57641115 P433 Q57641115-B05C4A83-D551-49F8-9073-69F1A36B9E54 @default.
- Q57641115 P478 Q57641115-0AFDE65B-EDDB-4328-BCA6-3FB5267D01DD @default.
- Q57641115 P50 Q57641115-496794F5-6F83-41C6-9AB1-E575F5E548E2 @default.
- Q57641115 P577 Q57641115-B77E4B97-3F48-42BD-8A6A-AAF2711316A7 @default.
- Q57641115 P356 1.4979709 @default.
- Q57641115 P1433 Q13739484 @default.
- Q57641115 P1476 "Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications" @default.
- Q57641115 P2093 "Alain C. Diebold" @default.
- Q57641115 P2093 "Beatriz Moreno" @default.
- Q57641115 P2093 "Cory S. Wajda" @default.
- Q57641115 P2093 "David Muir" @default.
- Q57641115 P2093 "Gert J. Leusink" @default.
- Q57641115 P2093 "Jean Jordan-Sweet" @default.
- Q57641115 P2093 "Kai-Hung Yu" @default.
- Q57641115 P2093 "Kandabara Tapily" @default.
- Q57641115 P2093 "Sonal Dey" @default.
- Q57641115 P2093 "Steven Consiglio" @default.
- Q57641115 P2093 "Takahiro Hakamata" @default.
- Q57641115 P304 "03E109" @default.
- Q57641115 P31 Q13442814 @default.
- Q57641115 P356 "10.1116/1.4979709" @default.
- Q57641115 P433 "3" @default.
- Q57641115 P478 "35" @default.
- Q57641115 P50 Q56525883 @default.
- Q57641115 P577 "2017-05-01T00:00:00Z" @default.